论文信息 - Deposition of hard magnetic rare-earth-Fe-B thin films by magnetron sputtering

Deposition of hard magnetic rare-earth-Fe-B thin films by magnetron sputtering

We report a systematic study of the microstructural and magnetic properties of rare-earth (RE) Fe-B films, with particular emphasis on the role of the RE:Fe ratio. Strongly textured RE-Fe-B thin films having one or more of the following magnetic properties—high coercivity (820 kA/m), remanence ratio (0.84), and maximum energy product (180 kJ/m3)—were prepared by magnetron sputtering on heated, thermally oxidized Si substrates.

M. Gibbs | L. Castaldi | H. Davies

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