论文信息 - Preparation of Si3N4 by Vapor‐Phase Reaction - 字舞流文

Preparation of Si3N4 by Vapor‐Phase Reaction

N. Setaka | Hidehiko Tanaka | M. Ishii | K. Kijima

[1] W. F. Knippenberg,et al. THE INFLUENCE OF IMPURITIES ON THE GROWTH OF SILICON CARBIDE CRYSTALS BY RECRYSTALLIZATION , 1969 .

[2] S. Hu. Properties of Amorphous Silicon Nitride Films , 1966 .