论文信息 - Microlithographic lens for DUV scanner

Microlithographic lens for DUV scanner

This paper describes several kinds of new technologies introduced into the latest microlithographic lens system for Nikon's DUV (Deep Ultra Violet) scanner.

Tomoyuki Matsuyama | Yuichi Shibazaki

[2] Tomoyuki Matsuyama,et al. New projection lens system for KrF exposure scanning tool , 2001, SPIE Advanced Lithography.