Experimental research on the localized electrochemical micro-machining

Due to several advantages and wider range of applications, micro-ECM is considered to be one of the most effective advanced future micromachining techniques. An experimental set-up for micro-ECM is constructed, which consists of various components and sub-systems, e.g. mechanical machining unit, nanosecond pulse power supply, circulation system of electrolyte, movement control component and process monitoring component. In addition, this system has the functions of fabricating micro tool electrode and machining status detection. Using the self-developed experimental system, the micro tool-electrode and the micro holes are sequentially machined. Upon the application of ultrashort voltage pulses, micro hole with 20μm diameter is obtained. Experimental results show the potential capability of electrochemical micromachining for better machining accuracy and smaller machining size.