Determination of the thermal conductivity of diamond-like nanocomposite films using a scanning thermal microscope

Amorphous “diamond-like/quartz-like” composites a-(C:H/Si:O) constitute a novel class of diamond-related materials with a number of unique bulk and surface properties. Using a thermal imaging microscope we have determined the thermal conductivity (κs) of a-(C:H/Si:O) films deposited on Si(001) substrates. We have developed a calibration procedure which makes it possible to use this method for the evaluation of not only topographical variations in κs but also absolute values.