Monolithic above-IC resonator technology for integrated architectures in mobile and wireless communication

This paper demonstrates the feasibility of an above-IC bulk acoustic wave technology for wireless applications. A double-lattice bulk acoustic wave (BAW) filter with balanced input and output has been designed and integrated as a post-process directly above 0.25 /spl mu/m BiCMOS wafers comprising RF circuits. This filter, featuring moderate insertion loss of -3dB and extreme out-of-band rejection (>-50 dB) is used in a simplified RF front-end receiver for the WCDMA standard, as well as in a new type of filtering LNA comprising two broadband amplifiers and one BAW filter.

[1]  Behzad Razavi,et al.  Design considerations for direct-conversion receivers , 1997 .

[2]  K. Lakin.  Thin film resonators and filters , 1999, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027).

[3]  R. Aigner,et al.  Integration of bulk acoustic wave filters: concepts and trends , 2004, 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).

[4]  B. Szelag,et al.  Fully-integrated WCDMA direct conversion SiGeC BiCMOS receiver , 2004, Bipolar/BiCMOS Circuits and Technology, 2004. Proceedings of the 2004 Meeting.

[5]  John D. Larson,et al.  Power handling and temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band , 2000, 2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121).

[6]  P. Muralt,et al.  Thickness dependence of the properties of highly c-axis textured AlN thin films , 2004 .

[7]  Kenneth Meade Lakin,et al.  Temperature compensated bulk acoustic thin film resonators , 2000, 2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121).

[8]  Wolfgang Brand,et al.  Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators , 2003 .

[9]  Kenneth Meade Lakin,et al.  Thin film bulk acoustic wave filters for GPS , 1992, IEEE 1992 Ultrasonics Symposium Proceedings.

[10]  Tsutomu Miyashita,et al.  High performance and miniature thin film bulk acoustic wave filters for 5 GHz , 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

[11]  R. Aigner,et al.  Bulk-acoustic-wave filters: performance optimization and volume manufacturing , 2003, IEEE MTT-S International Microwave Symposium Digest, 2003.

[12]  Paul Muralt,et al.  Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering , 2001 .

[13]  J. Larson,et al.  Ultra-miniature high-Q filters and duplexers using FBAR technology , 2001, 2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177).