论文信息 - Effects of gamma radiation on suspended silicon nanogauges bridge used for MEMS transduction - 字舞流文

Effects of gamma radiation on suspended silicon nanogauges bridge used for MEMS transduction

P. Rey | C. Poulain | J. Armani | G. Jourdan | P. Morfouli | A. Koumela | A. Berthelot | A. Dupret | P. Janioud