High piezoelectric properties in LiNbO3 transferred layer by the Smart Cut™ technology for ultra wide band BAW filter applications
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C. Mazure | B. Ghyselen | L. Clavelier | S. Ballandras | E. Defay | F. Rieutord | A. Reinhardt | F. Mazen | A. Tauzin | C. Deguet | M. Pijolat | J. Dechamp | J. Moulet | M. Aid