A review on coupled MEMS resonators for sensing applications utilizing mode localization

Abstract In this paper, we review a recent technology development based on coupled MEMS resonators that has the potential of fundamentally transforming MEMS resonant sensors. Conventionally MEMS resonant sensors use only a single resonator as the sensing element, and the output of the sensor is typically a frequency shift caused by the external stimulus altering the mechanical properties, i.e. the mass or stiffness, of the resonator. Recently, transduction techniques utilizing additional coupled resonators have emerged. The mode-localized resonant sensor is one example of such a technique. If the mode localization effect is utilized, the vibrational amplitude pattern of the resonators changes as a function of the quantity to be measured. Compared to using frequency shift as an output signal, the sensitivity can be improved by several orders of magnitude. Another feature of the mode-localized sensors is the common mode rejection abilities due to the differential structure. These advantages have opened doors for new sensors with unprecedented sensitivity.

[1]  J. Sullivan,et al.  Highly sensitive mass detection and identification using vibration localization in coupled microcantilever arrays , 2008 .

[2]  J. Woodhouse,et al.  Vibration isolation from irregularity in a nearly periodic structure: Theory and measurements , 1983 .

[3]  Li Chen,et al.  A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications , 2007, IEEE Sensors Journal.

[4]  M. Kraft,et al.  A force sensor based on three weakly coupled resonators with ultrahigh sensitivity , 2015 .

[5]  E. Dowell,et al.  Localization of vibrations by structural irregularity , 1987 .

[6]  B. Bahreyni,et al.  Characterization of Disturbances in Systems of Coupled Micro-Resonator Arrays , 2012, IEEE Sensors Journal.

[7]  G.K. Fedder,et al.  A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer , 2004, IEEE Journal of Solid-State Circuits.

[8]  Jize Yan,et al.  Limits to mode-localized sensing using micro- and nanomechanical resonator arrays , 2011 .

[9]  Edmond Cretu,et al.  Weakly-Coupled Resonators in Capacitive Readout Circuits , 2015, IEEE Transactions on Circuits and Systems I: Regular Papers.

[10]  Farrokh Ayazi,et al.  A Low Phase Noise 100MHz Silicon BAW Reference Oscillator , 2006, IEEE Custom Integrated Circuits Conference 2006.

[11]  Massood Tabib-Azar,et al.  Magnetically coupled resonators for rate integrating gyroscopes , 2014, IEEE SENSORS 2014 Proceedings.

[12]  F. Ayazi,et al.  Electrically coupled MEMS bandpass filters: Part II. Without coupling element , 2005 .

[13]  A. Pisano,et al.  Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators , 2007, Journal of Microelectromechanical Systems.

[14]  C. Pierre.  Mode localization and eigenvalue loci veering phenomena in disordered structures , 1988 .

[15]  Greg E. Bridges,et al.  Wireless passive sensor for pH monitoring inside a small bioreactor , 2013, 2013 IEEE International Instrumentation and Measurement Technology Conference (I2MTC).

[16]  A. Leissa.  On a curve veering aberration , 1974 .

[17]  F. Ayazi,et al.  Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes , 2006, 2006 International Electron Devices Meeting.

[18]  Steven W. Shaw,et al.  A single input-single output coupled microresonator array for the detection and identification of multiple analytes , 2008 .

[19]  Maria Prudenziati,et al.  Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films , 1992 .

[20]  M. Kraft,et al.  A Three Degree-of-Freedom Weakly Coupled Resonator Sensor With Enhanced Stiffness Sensitivity , 2016, Journal of Microelectromechanical Systems.

[21]  Roger T. Howe,et al.  Silicon Resonant Microsensors , 2008 .

[22]  A. Seshia,et al.  Ultrasensitive mode-localized micromechanical electrometer , 2010, 2010 IEEE International Frequency Control Symposium.

[23]  Eun Sok Kim,et al.  Micromachined acoustic resonant mass sensor , 2005 .

[24]  M. Kraft,et al.  Atmospheric pressure mode localization coupled resonators force sensor , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[26]  K. Jensen,et al.  An atomic-resolution nanomechanical mass sensor. , 2008, Nature Nanotechnology.

[27]  David Elata,et al.  Differential internal dielectric transduction of a Lamé-mode resonator , 2010 .

[28]  Daniel Rugar,et al.  Sub-attonewton force detection at millikelvin temperatures , 2001 .

[29]  S. Manalis,et al.  Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection , 2006, Journal of Microelectromechanical Systems.

[30]  M. Calleja,et al.  Mass sensing based on deterministic and stochastic responses of elastically coupled nanocantilevers. , 2009, Nano letters.

[31]  M. Roukes,et al.  Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications. , 2007, Nature nanotechnology.

[32]  Stephen P. Timoshenko,et al.  Vibration problems in engineering , 1928 .

[33]  M. Kraft,et al.  Comparative study of different output metrics for a three weakly coupled resonator sensor , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[34]  Ashwin A. Seshia,et al.  A vacuum packaged surface micromachined resonant accelerometer , 2002 .

[35]  Koen Mouthaan,et al.  Wideband Bandpass Filters With SAW-Filter-Like Selectivity Using Chip SAW Resonators , 2014, IEEE Transactions on Microwave Theory and Techniques.

[36]  Chun Zhao.  A MEMS sensor for stiffness change sensing applications based on three weakly coupled resonators , 2016 .

[37]  S. Montague,et al.  An integrated microelectromechanical resonant output gyroscope , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[38]  I. Ishikawa,et al.  Full-circular surface acoustic wave excitation for high resolution acoustic microscopy using spherical lens and time gate technology , 1999, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[39]  N. Aluru,et al.  Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation , 2012, Journal of Microelectromechanical Systems.

[40]  D. Rugar,et al.  Frequency modulation detection using high‐Q cantilevers for enhanced force microscope sensitivity , 1991 .

[41]  M.J. Tudor,et al.  Micromachined silicon resonant strain gauges fabricated using SOI wafer technology , 2000, Journal of Microelectromechanical Systems.

[42]  C. Nguyen.  MEMS technology for timing and frequency control , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[43]  Jize Yan,et al.  Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity , 2010 .

[44]  B. Boser,et al.  A MEMS resonant strain sensor operated in air , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

[45]  T. A. Roessig,et al.  Surface-micromachined resonant accelerometer , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[46]  L. Katehi,et al.  A 3.4 – 6.2 GHz Continuously tunable electrostatic MEMS resonator with quality factor of 460–530 , 2009, 2009 IEEE MTT-S International Microwave Symposium Digest.

[47]  Rashid Bashir,et al.  Microresonator mass sensors for detection of Bacillus anthracis Sterne spores in air and water. , 2007, Biosensors & bioelectronics.

[48]  D.R. Gallagher,et al.  Orthogonal Frequency Coded SAW Sensors for Aerospace SHM Applications , 2009, IEEE Sensors Journal.

[49]  R. Full,et al.  Adhesive force of a single gecko foot-hair , 2000, Nature.

[50]  A.B.M. Jansman,et al.  4D-3 A 2 GHz Reference Oscillator incorporating a Temperature Compensated BAW Resonator , 2006, 2006 IEEE Ultrasonics Symposium.

[51]  T. Kenny,et al.  A unified epi-seal process for resonators and inertial sensors , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[53]  Reza Abdolvand,et al.  Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique , 2012, IEEE Journal of Solid-State Circuits.

[54]  Hsien-Shun Liao,et al.  Cantilever-based mass sensor using high order resonances for liquid environment , 2011, 2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM).

[55]  Thomas W. Kenny,et al.  A high-stiffness axial resonant probe for atomic force microscopy , 2001 .

[56]  S. K. Bahl,et al.  Sequence Specific Label-Free DNA Sensing Using Film-Bulk-Acoustic-Resonators , 2007, IEEE Sensors Journal.

[57]  Oliver Brand,et al.  Micromachined Resonant Sensors — an Overview , 1998 .

[58]  Franz J. Giessibl,et al.  A direct method to calculate tip–sample forces from frequency shifts in frequency-modulation atomic force microscopy , 2001 .

[59]  Yong Zhu,et al.  A Resonant Micromachined Electrostatic Charge Sensor , 2008, IEEE Sensors Journal.

[60]  Farrokh Ayazi,et al.  High-Frequency AlN-on-Silicon Resonant Square Gyroscopes , 2013, Journal of Microelectromechanical Systems.

[61]  Hai Zhu,et al.  Thermoplasmonic Membrane-Based Infrared Detector , 2014, IEEE Photonics Technology Letters.

[62]  P. Anderson.  Absence of Diffusion in Certain Random Lattices , 1958 .

[63]  Ultrasensitive resonant MEMS transducers with tunable coupling , 2013 .

[64]  Jize Yan,et al.  Enhancing Parametric Sensitivity in Electrically Coupled MEMS Resonators , 2009, Journal of Microelectromechanical Systems.

[65]  Michael Kraft,et al.  A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor , 2015 .

[66]  A. Bachtold,et al.  Ultrasensitive mass sensing with a nanotube electromechanical resonator. , 2008, Nano letters.

[67]  Christophe Pierre,et al.  Strong Mode Localization in Nearly Periodic Disordered Structures , 1989 .

[68]  M. Roukes,et al.  Ultrasensitive nanoelectromechanical mass detection , 2004, cond-mat/0402528.

[69]  T. Kenny,et al.  Hermetically encapsulated differential resonant accelerometer , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[70]  Kwan Kyu Park,et al.  A Multichannel Oscillator for a Resonant Chemical Sensor System , 2014, IEEE Transactions on Industrial Electronics.

[71]  M. Kraft,et al.  Micromachined Vibratory Gyroscopes Controlled by a High-Order Bandpass Sigma-Delta Modulator , 2007, IEEE Sensors Journal.

[72]  Behzad Razavi,et al.  Design of Analog CMOS Integrated Circuits , 1999 .

[73]  Francesca Campabadal,et al.  Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry , 2005 .

[74]  R. Howe,et al.  An integrated CMOS micromechanical resonator high-Q oscillator , 1999, IEEE J. Solid State Circuits.

[75]  D.C. Malocha,et al.  Cryogenic Liquid Sensing Using SAW Devices , 2007, 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum.

[76]  B. Bahreyni,et al.  Improving Sensitivity of Resonant Sensor Systems Through Strong Mechanical Coupling , 2016, Journal of Microelectromechanical Systems.

[77]  Jize Yan,et al.  Manipulating Vibration Energy Confinement in Electrically Coupled Microelectromechanical Resonator Arrays , 2011, Journal of Microelectromechanical Systems.

[78]  M. Kraft,et al.  A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity , 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

[79]  B. Chui,et al.  Single spin detection by magnetic resonance force microscopy , 2004, Nature.

[80]  Julian W. Gardner,et al.  A laterally driven micromachined resonant pressure sensor , 1996 .

[81]  A. A. Seshia,et al.  Mode-Localized Displacement Sensing , 2012, Journal of Microelectromechanical Systems.

[82]  R. Ghodssi,et al.  Indium Phosphide Resonant Chemical Sensor with a Monolithically Integrated Optical Readout Scheme , 2007, 2007 IEEE Sensors.

[84]  J. Woodhouse,et al.  Confinement of vibration by structural irregularity , 1981 .

[85]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[86]  P. Monfraix,et al.  Large band-pass BAW filter for space applications , 2011, 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings.

[87]  Xianfan Xu,et al.  Ultrasensitive mass sensing using mode localization in coupled microcantilevers , 2006 .

[88]  A. Agogino,et al.  A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology , 2005, IEEE Sensors Journal.

[89]  M. Roukes,et al.  Zeptogram-scale nanomechanical mass sensing. , 2005, Nano letters.

[90]  Chengjie Zuo,et al.  12E-3 Channel-Select RF MEMS Filters Based on Self-Coupled AlN Contour-Mode Piezoelectric Resonators , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.