A review on coupled MEMS resonators for sensing applications utilizing mode localization
暂无分享,去创建一个
Suan Hui Pu | Ashwin A. Seshia | Chun Zhao | Michael Kraft | Graham S. Wood | Mohammad H. Montaseri | M. Kraft | A. Seshia | Chun Zhao | G. Wood | S. H. Pu | M. Montaseri
[1] J. Sullivan,et al. Highly sensitive mass detection and identification using vibration localization in coupled microcantilever arrays , 2008 .
[2] J. Woodhouse,et al. Vibration isolation from irregularity in a nearly periodic structure: Theory and measurements , 1983 .
[3] Li Chen,et al. A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications , 2007, IEEE Sensors Journal.
[4] M. Kraft,et al. A force sensor based on three weakly coupled resonators with ultrahigh sensitivity , 2015 .
[5] E. Dowell,et al. Localization of vibrations by structural irregularity , 1987 .
[6] B. Bahreyni,et al. Characterization of Disturbances in Systems of Coupled Micro-Resonator Arrays , 2012, IEEE Sensors Journal.
[7] G.K. Fedder,et al. A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer , 2004, IEEE Journal of Solid-State Circuits.
[8] Jize Yan,et al. Limits to mode-localized sensing using micro- and nanomechanical resonator arrays , 2011 .
[9] Edmond Cretu,et al. Weakly-Coupled Resonators in Capacitive Readout Circuits , 2015, IEEE Transactions on Circuits and Systems I: Regular Papers.
[10] Farrokh Ayazi,et al. A Low Phase Noise 100MHz Silicon BAW Reference Oscillator , 2006, IEEE Custom Integrated Circuits Conference 2006.
[11] Massood Tabib-Azar,et al. Magnetically coupled resonators for rate integrating gyroscopes , 2014, IEEE SENSORS 2014 Proceedings.
[12] F. Ayazi,et al. Electrically coupled MEMS bandpass filters: Part II. Without coupling element , 2005 .
[13] A. Pisano,et al. Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators , 2007, Journal of Microelectromechanical Systems.
[14] C. Pierre. Mode localization and eigenvalue loci veering phenomena in disordered structures , 1988 .
[15] Greg E. Bridges,et al. Wireless passive sensor for pH monitoring inside a small bioreactor , 2013, 2013 IEEE International Instrumentation and Measurement Technology Conference (I2MTC).
[16] A. Leissa. On a curve veering aberration , 1974 .
[17] F. Ayazi,et al. Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes , 2006, 2006 International Electron Devices Meeting.
[18] Steven W. Shaw,et al. A single input-single output coupled microresonator array for the detection and identification of multiple analytes , 2008 .
[19] Maria Prudenziati,et al. Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films , 1992 .
[20] M. Kraft,et al. A Three Degree-of-Freedom Weakly Coupled Resonator Sensor With Enhanced Stiffness Sensitivity , 2016, Journal of Microelectromechanical Systems.
[21] Roger T. Howe,et al. Silicon Resonant Microsensors , 2008 .
[22] A. Seshia,et al. Ultrasensitive mode-localized micromechanical electrometer , 2010, 2010 IEEE International Frequency Control Symposium.
[23] Eun Sok Kim,et al. Micromachined acoustic resonant mass sensor , 2005 .
[24] M. Kraft,et al. Atmospheric pressure mode localization coupled resonators force sensor , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
[26] K. Jensen,et al. An atomic-resolution nanomechanical mass sensor. , 2008, Nature Nanotechnology.
[27] David Elata,et al. Differential internal dielectric transduction of a Lamé-mode resonator , 2010 .
[28] Daniel Rugar,et al. Sub-attonewton force detection at millikelvin temperatures , 2001 .
[29] S. Manalis,et al. Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection , 2006, Journal of Microelectromechanical Systems.
[30] M. Calleja,et al. Mass sensing based on deterministic and stochastic responses of elastically coupled nanocantilevers. , 2009, Nano letters.
[31] M. Roukes,et al. Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications. , 2007, Nature nanotechnology.
[32] Stephen P. Timoshenko,et al. Vibration problems in engineering , 1928 .
[33] M. Kraft,et al. Comparative study of different output metrics for a three weakly coupled resonator sensor , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
[34] Ashwin A. Seshia,et al. A vacuum packaged surface micromachined resonant accelerometer , 2002 .
[35] Koen Mouthaan,et al. Wideband Bandpass Filters With SAW-Filter-Like Selectivity Using Chip SAW Resonators , 2014, IEEE Transactions on Microwave Theory and Techniques.
[36] Chun Zhao. A MEMS sensor for stiffness change sensing applications based on three weakly coupled resonators , 2016 .
[37] S. Montague,et al. An integrated microelectromechanical resonant output gyroscope , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
[38] I. Ishikawa,et al. Full-circular surface acoustic wave excitation for high resolution acoustic microscopy using spherical lens and time gate technology , 1999, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[39] N. Aluru,et al. Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation , 2012, Journal of Microelectromechanical Systems.
[40] D. Rugar,et al. Frequency modulation detection using high‐Q cantilevers for enhanced force microscope sensitivity , 1991 .
[41] M.J. Tudor,et al. Micromachined silicon resonant strain gauges fabricated using SOI wafer technology , 2000, Journal of Microelectromechanical Systems.
[42] C. Nguyen. MEMS technology for timing and frequency control , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[43] Jize Yan,et al. Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity , 2010 .
[44] B. Boser,et al. A MEMS resonant strain sensor operated in air , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
[45] T. A. Roessig,et al. Surface-micromachined resonant accelerometer , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[46] L. Katehi,et al. A 3.4 – 6.2 GHz Continuously tunable electrostatic MEMS resonator with quality factor of 460–530 , 2009, 2009 IEEE MTT-S International Microwave Symposium Digest.
[47] Rashid Bashir,et al. Microresonator mass sensors for detection of Bacillus anthracis Sterne spores in air and water. , 2007, Biosensors & bioelectronics.
[48] D.R. Gallagher,et al. Orthogonal Frequency Coded SAW Sensors for Aerospace SHM Applications , 2009, IEEE Sensors Journal.
[49] R. Full,et al. Adhesive force of a single gecko foot-hair , 2000, Nature.
[50] A.B.M. Jansman,et al. 4D-3 A 2 GHz Reference Oscillator incorporating a Temperature Compensated BAW Resonator , 2006, 2006 IEEE Ultrasonics Symposium.
[51] T. Kenny,et al. A unified epi-seal process for resonators and inertial sensors , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
[53] Reza Abdolvand,et al. Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique , 2012, IEEE Journal of Solid-State Circuits.
[54] Hsien-Shun Liao,et al. Cantilever-based mass sensor using high order resonances for liquid environment , 2011, 2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM).
[55] Thomas W. Kenny,et al. A high-stiffness axial resonant probe for atomic force microscopy , 2001 .
[56] S. K. Bahl,et al. Sequence Specific Label-Free DNA Sensing Using Film-Bulk-Acoustic-Resonators , 2007, IEEE Sensors Journal.
[57] Oliver Brand,et al. Micromachined Resonant Sensors — an Overview , 1998 .
[58] Franz J. Giessibl,et al. A direct method to calculate tip–sample forces from frequency shifts in frequency-modulation atomic force microscopy , 2001 .
[59] Yong Zhu,et al. A Resonant Micromachined Electrostatic Charge Sensor , 2008, IEEE Sensors Journal.
[60] Farrokh Ayazi,et al. High-Frequency AlN-on-Silicon Resonant Square Gyroscopes , 2013, Journal of Microelectromechanical Systems.
[61] Hai Zhu,et al. Thermoplasmonic Membrane-Based Infrared Detector , 2014, IEEE Photonics Technology Letters.
[62] P. Anderson. Absence of Diffusion in Certain Random Lattices , 1958 .
[63] Ultrasensitive resonant MEMS transducers with tunable coupling , 2013 .
[64] Jize Yan,et al. Enhancing Parametric Sensitivity in Electrically Coupled MEMS Resonators , 2009, Journal of Microelectromechanical Systems.
[65] Michael Kraft,et al. A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor , 2015 .
[66] A. Bachtold,et al. Ultrasensitive mass sensing with a nanotube electromechanical resonator. , 2008, Nano letters.
[67] Christophe Pierre,et al. Strong Mode Localization in Nearly Periodic Disordered Structures , 1989 .
[68] M. Roukes,et al. Ultrasensitive nanoelectromechanical mass detection , 2004, cond-mat/0402528.
[69] T. Kenny,et al. Hermetically encapsulated differential resonant accelerometer , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
[70] Kwan Kyu Park,et al. A Multichannel Oscillator for a Resonant Chemical Sensor System , 2014, IEEE Transactions on Industrial Electronics.
[71] M. Kraft,et al. Micromachined Vibratory Gyroscopes Controlled by a High-Order Bandpass Sigma-Delta Modulator , 2007, IEEE Sensors Journal.
[72] Behzad Razavi,et al. Design of Analog CMOS Integrated Circuits , 1999 .
[73] Francesca Campabadal,et al. Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry , 2005 .
[74] R. Howe,et al. An integrated CMOS micromechanical resonator high-Q oscillator , 1999, IEEE J. Solid State Circuits.
[75] D.C. Malocha,et al. Cryogenic Liquid Sensing Using SAW Devices , 2007, 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum.
[76] B. Bahreyni,et al. Improving Sensitivity of Resonant Sensor Systems Through Strong Mechanical Coupling , 2016, Journal of Microelectromechanical Systems.
[77] Jize Yan,et al. Manipulating Vibration Energy Confinement in Electrically Coupled Microelectromechanical Resonator Arrays , 2011, Journal of Microelectromechanical Systems.
[78] M. Kraft,et al. A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity , 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
[79] B. Chui,et al. Single spin detection by magnetic resonance force microscopy , 2004, Nature.
[80] Julian W. Gardner,et al. A laterally driven micromachined resonant pressure sensor , 1996 .
[81] A. A. Seshia,et al. Mode-Localized Displacement Sensing , 2012, Journal of Microelectromechanical Systems.
[82] R. Ghodssi,et al. Indium Phosphide Resonant Chemical Sensor with a Monolithically Integrated Optical Readout Scheme , 2007, 2007 IEEE Sensors.
[84] J. Woodhouse,et al. Confinement of vibration by structural irregularity , 1981 .
[85] H. Nathanson,et al. The resonant gate transistor , 1967 .
[86] P. Monfraix,et al. Large band-pass BAW filter for space applications , 2011, 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings.
[87] Xianfan Xu,et al. Ultrasensitive mass sensing using mode localization in coupled microcantilevers , 2006 .
[88] A. Agogino,et al. A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology , 2005, IEEE Sensors Journal.
[89] M. Roukes,et al. Zeptogram-scale nanomechanical mass sensing. , 2005, Nano letters.
[90] Chengjie Zuo,et al. 12E-3 Channel-Select RF MEMS Filters Based on Self-Coupled AlN Contour-Mode Piezoelectric Resonators , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.