Improved cell design for Schottky barrier infrared detector arrays

The responsivity of large scale platinum silicide arrays, having small pixels, is low compared to the responsivity of large area test diodes fabricated on the same wafer. Often, the responsivity loss is described by assigning a lower Fowler emission coefficient to the detectors. We find the reduced responsivity to be the direct result of a reduction in the effective active area of the detector. This reduction in effective active area becomes more pronounced as the detector cell size is reduced. We provide a simple model for the area reduction in terms of modulation of detector Schottky potential by the underlying depletion region of the detector guard ring. We also suggest changes in the detector array unit cell design, which will maximize responsivity.