Packaging of a reflective optical duplexer based on silicon micromechanics

We present a fully packaged duplexer implementing a reflective Fabry-Perot modulator realised by silicon surface micromachining. The device demonstrates excellent performance for bit rates up to 2.8 Mbit/s. Relaxed positioning tolerances, a fiber to fiber loss below 3 dB, an extinction ratio better than 12 dB, and the potential for low cost fabrication make this device very attractive for use in economical optical links.