Large-area nanoscale patterning: chemistry meets fabrication.

This Account describes a new paradigm for large-area nanoscale patterning that combines bottom-up and top-down approaches, merging chemistry with fabrication. This hybrid strategy uses simple nanofabrication techniques to control the alignment, size, shape, and periodicity of nanopatterns and chemical methods to control their materials properties and crystallinity. These tools are highly flexible and can create surface-patterned nanostructures with unusual properties and free-standing nanostructures that are multifunctional and monodisperse. The unprecedented scientific and technological opportunities enabled by nanoscale patterning over wafer-sized areas are discussed.

[1]  Kendall N Houk,et al.  Accounts of Chemical Research. , 2008, Accounts of chemical research.

[2]  Gu Ben,et al.  Surface plasmon subwavelength optics:principles and novel effects , 2007 .

[3]  P. Prasad,et al.  Synthesis and plasmonic properties of silver and gold nanoshells on polystyrene cores of different size and of gold-silver core-shell nanostructures , 2006 .

[4]  Jan Hendrik Peters.  Status of EUVL mask development in Europe , 2006 .

[5]  George C Schatz,et al.  Surface plasmon standing waves in large-area subwavelength hole arrays. , 2005, Nano letters.

[6]  C. Keating,et al.  Batch preparation of linear Au and Ag nanoparticle chains via wet chemistry. , 2005, Nano letters.

[7]  George M. Whitesides,et al.  New Approaches to Nanofabrication: Molding, Printing, and Other Techniques , 2005 .

[8]  Teri W. Odom,et al.  Mesoscale metallic pyramids with nanoscale tips. , 2005, Nano letters.

[9]  Stephen Gray,et al.  Surface plasmon generation and light transmission by isolated nanoholes and arrays of nanoholes in thin metal films. , 2005, Optics express.

[10]  S. Seal,et al.  Spontaneous self-assembly of cerium oxide nanoparticles to nanorods through supraaggregate formation. , 2005, The journal of physical chemistry. B.

[11]  J. Switzer,et al.  Molybdenum disulfide nanowires and nanoribbons by electrochemical/chemical synthesis. , 2005, The journal of physical chemistry. B.

[12]  Neil C. Simmons,et al.  Directed spatial organization of zinc oxide nanorods. , 2004, Nano letters.

[13]  John A. Rogers,et al.  Photolithographic Route to the Fabrication of Micro/Nanowires of III–V Semiconductors , 2005 .

[14]  Luke P. Lee,et al.  Nanophotonic crescent moon structures with sharp edge for ultrasensitive biomolecular detection by local electromagnetic field enhancement effect. , 2005, Nano letters.

[15]  N J Halas,et al.  Surface-enhanced Raman scattering on tunable plasmonic nanoparticle substrates , 2004, Proceedings of the National Academy of Sciences of the United States of America.

[16]  Taeghwan Hyeon,et al.  Ultra-large-scale syntheses of monodisperse nanocrystals , 2004, Nature materials.

[17]  Zhifeng Ren,et al.  Periodicity and alignment of large-scale carbon nanotubes arrays , 2004 .

[18]  Ian A. Tonks,et al.  Fabrication of Free-Standing Metallic Pyramidal Shells , 2004 .

[19]  Michael J McFarland,et al.  Large-scale fabrication of wafer-size colloidal crystals, macroporous polymers and nanocomposites by spin-coating. , 2004, Journal of the American Chemical Society.

[20]  Elton Graugnard,et al.  Large-Scale Fabrication of Ordered Nanobowl Arrays , 2004 .

[21]  Alexandre G. Brolo,et al.  Nanohole-Enhanced Raman Scattering , 2004 .

[22]  T. Odom,et al.  Templated and Hierarchical Assembly of CdSe/ZnS Quantum Dots , 2004 .

[23]  Teri W. Odom,et al.  Directed Growth of Ordered Arrays of Small‐Diameter ZnO Nanowires , 2004 .

[24]  James V. Coe,et al.  Use of the Extraordinary Infrared Transmission of Metallic Subwavelength Arrays To Study the Catalyzed Reaction of Methanol to Formaldehyde on Copper Oxide , 2004 .

[25]  Teri W. Odom,et al.  Mass-limited growth in zeptoliter beakers: A general approach for the synthesis of nanocrystals , 2004 .

[26]  C. Sow,et al.  Surface modification studies of edge-oriented molybdenum sulfide nanosheets. , 2004, Langmuir : the ACS journal of surfaces and colloids.

[27]  Jiaguo Yu,et al.  Preparation and photocatalytic behavior of MoS2 and WS2 nanocluster sensitized TiO2. , 2004, Langmuir : the ACS journal of surfaces and colloids.

[28]  K. Kavanagh,et al.  Surface plasmon sensor based on the enhanced light transmission through arrays of nanoholes in gold films. , 2004, Langmuir : the ACS journal of surfaces and colloids.

[29]  Mikael T. Björk,et al.  Integration of Colloidal Nanocrystals into Lithographically Patterned Devices , 2004 .

[30]  Xiaodong Chen,et al.  Lateral Patterning of Luminescent CdSe Nanocrystals by Selective Dewetting from Self-Assembled Organic Templates , 2004 .

[31]  Zhong Lin Wang,et al.  Large-Scale Hexagonal-Patterned Growth of Aligned ZnO Nanorods for Nano-optoelectronics and Nanosensor Arrays. , 2004, Nano letters.

[32]  D. Reinhoudt,et al.  Writing patterns of molecules on molecular printboards. , 2004, Angewandte Chemie.

[33]  Magnetic-field-assisted assembly of metal/polymer/metal junction sensors , 2004 .

[34]  P. Alivisatos.  The use of nanocrystals in biological detection , 2004, Nature Biotechnology.

[35]  George M. Whitesides,et al.  UNCONVENTIONAL NANOFABRICATION , 2004 .

[36]  Jean-Claude Weeber,et al.  Launching and decoupling surface plasmons via micro-gratings , 2003 .

[37]  S. Turner,et al.  Zero-Mode Waveguides for Single-Molecule Analysis at High Concentrations , 2003, Science.

[38]  George M Whitesides,et al.  Generation of 30-50 nm structures using easily fabricated, composite PDMS masks. , 2002, Journal of the American Chemical Society.

[39]  K. Birdi,et al.  Handbook of Surface and Colloid Chemistry , 2002 .

[40]  Zhiyong Tang,et al.  Spontaneous Organization of Single CdTe Nanoparticles into Luminescent Nanowires , 2002, Science.

[41]  George M. Whitesides,et al.  Fabrication and Wetting Properties of Metallic Half-Shells with Submicron Diameters , 2002 .

[42]  R A Linke,et al.  Beaming Light from a Subwavelength Aperture , 2002, Science.

[43]  N. Barreau,et al.  MoS2 textured films grown on glass substrates through sodium sulfide based compounds , 2002 .

[44]  Heon-Jin Choi,et al.  Controlled growth of ZnO nanowires and their optical properties , 2002 .

[45]  George M. Whitesides,et al.  Improved pattern transfer in soft lithography using composite stamps , 2002 .

[46]  M. Madou.  Fundamentals of microfabrication : the science of miniaturization , 2002 .

[47]  Zhen Yao,et al.  Carbon Nanotube Single‐Electron Transistors at Room Temperature. , 2001 .

[48]  R. G. Freeman,et al.  Submicrometer metallic barcodes. , 2001, Science.

[49]  Eicke R. Weber,et al.  Room-Temperature Ultraviolet Nanowire Nanolasers. , 2001 .

[50]  Yu Huang,et al.  Indium Phosphide Nanowires as Building Blocks for Nanoscale Electronic and Optoelectronic Devices. , 2001 .

[51]  P. Yang,et al.  Langmuir-Blodgett nanorod assembly. , 2001, Journal of the American Chemical Society.

[52]  R. Dasari,et al.  Surface-enhanced Raman scattering and biophysics , 2001 .

[53]  M. Shair,et al.  Reaction microarrays: a method for rapidly determining the enantiomeric excess of thousands of samples. , 2001, Journal of the American Chemical Society.

[54]  河田 聡,et al.  Near-field optics and surface plasmon polaritons , 2001 .

[55]  Younan Xia,et al.  A Soft Lithography Approach to the Fabrication of Nanostructures of Single Crystalline Silicon with Well‐Defined Dimensions and Shapes , 2000 .

[56]  P. A. Smith,et al.  Electric-field assisted assembly and alignment of metallic nanowires , 2000 .

[57]  N. D. Rooij,et al.  All-photoplastic, soft cantilever cassette probe for scanning force microscopy , 2000 .

[58]  Heinz Schmid,et al.  Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography , 2000 .

[59]  D. Botstein,et al.  Cluster analysis and display of genome-wide expression patterns. , 1998, Proceedings of the National Academy of Sciences of the United States of America.

[60]  H. Lezec,et al.  Extraordinary optical transmission through sub-wavelength hole arrays , 1998, Nature.

[61]  G. Whitesides,et al.  Soft Lithography. , 1998, Angewandte Chemie.

[62]  M. Reed,et al.  Conductance of a Molecular Junction , 1997 .

[63]  Andrew K. L. Lim,et al.  A single-electron transistor made from a cadmium selenide nanocrystal , 1997, Nature.

[64]  Sidney R. Cohen,et al.  Hollow nanoparticles of WS2 as potential solid-state lubricants , 1997, Nature.

[65]  Steven J. Holmes,et al.  Negative photoresists for optical lithography , 1997, IBM J. Res. Dev..

[66]  Charles R. Martin,et al.  A general template-based method for the preparation of nanomaterials , 1997 .

[67]  R. V. Duyne,et al.  Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces , 1995 .

[68]  Charles R. Martin,et al.  Nanomaterials: A Membrane-Based Synthetic Approach , 1994, Science.