论文信息 - Design and fabrication of a MEMS 1-D optical scanner using self-assembled vertical combs and scan-angle magnifying mechanism

Design and fabrication of a MEMS 1-D optical scanner using self-assembled vertical combs and scan-angle magnifying mechanism

We report a novel one-axis MEMS optical scanner with a scan-angle magnifying mechanism. Small actuator-motion was amplified through the two-mass-two-spring mechanism, and a large mirror angle was obtained

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