Micromechanical resonator with ultra-high quality factor
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A 6.3 MHz Lame-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor (Q) values over 1 million in ambient pressures as high as 200 Pa is reported. A maximum Q value of 1.6 million was experimentally measured for the resonator designed for this study. It was also experimentally observed that the Q value for the designed bulk mode resonator was relatively independent for pressures below 200 Pa, suggesting that the Q is pressure limited for pressure higher than 200 Pa.
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