A piezoelectric motor operated under the superposition of the second and third bending modes of a sandwich transducer

ABSTRACT A rotary piezoelectric motor was proposed, in which the second and third bending vibrations of a transducer were superimposed to produce reverse elliptical movements on the two driving tips. The second bending mode was used to overcome the preload, whereas the third bending mode was used to rotate the rotor. The frequency tuning process of the two bending modes was discussed. The working frequency, the maximum no-load speed, the maximum torque and the maximum efficiency of the prototype were tested to be 23.8 kHz, 130 r/min, 2.96 N·m and 16.8%, respectively.

[1]  Jian-Xin Xu,et al.  High Performance Tracking of Piezoelectric Positioning Stage Using Current-cycle Iterative Learning Control With Gain Scheduling , 2013 .

[2]  Filip Szufnarowski,et al.  Force control of a piezoelectric actuator based on a statistical system model and dynamic compensation , 2011 .

[3]  Kenji Uchino,et al.  Piezoelectric Actuators and Ultrasonic Motors , 1996 .

[4]  F P Dawson,et al.  A finite volume method and experimental study of a stator of a piezoelectric traveling wave rotary ultrasonic motor. , 2014, Ultrasonics.

[5]  Ming-Yang Cheng,et al.  Development of a Recurrent Fuzzy CMAC With Adjustable Input Space Quantization and Self-Tuning Learning Rate for Control of a Dual-Axis Piezoelectric Actuated Micromotion Stage , 2013, IEEE Transactions on Industrial Electronics.

[6]  Weishan Chen,et al.  A T-shape linear piezoelectric motor with single foot. , 2015, Ultrasonics.

[7]  Shuxiang Dong,et al.  A two-layer linear piezoelectric micromotor , 2015, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

[8]  Li-Min Zhu,et al.  Modeling and Compensation of Asymmetric Hysteresis Nonlinearity for Piezoceramic Actuators With a Modified Prandtl–Ishlinskii Model , 2014, IEEE Transactions on Industrial Electronics.

[9]  Hong Hu,et al.  Modeling and experimental analysis of the linear ultrasonic motor with in-plane bending and longitudinal mode. , 2014, Ultrasonics.

[10]  Patrick Harkness,et al.  A design approach for longitudinal–torsional ultrasonic transducers , 2013 .

[11]  Chunsheng Zhao,et al.  Linear ultrasonic motor with wheel-shaped stator , 2010 .

[12]  Kok Kiong Tan,et al.  Adaptive Sliding-Mode Control of Piezoelectric Actuators , 2009, IEEE Transactions on Industrial Electronics.

[13]  Shuxiang Dong,et al.  A standing wave linear ultrasonic motor operating in in-plane expanding and bending modes. , 2015, The Review of scientific instruments.

[14]  Shiyang Li,et al.  Temperature evaluation of traveling-wave ultrasonic motor considering interaction between temperature rise and motor parameters. , 2015, Ultrasonics.

[15]  Lin Yang,et al.  A novel in-plane mode rotary ultrasonic motor , 2014 .

[16]  Masayoshi Esashi,et al.  Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film , 2015 .

[17]  Xiaohui Yang,et al.  A High-Power Linear Ultrasonic Motor Using Bending Vibration Transducer , 2013, IEEE Transactions on Industrial Electronics.

[18]  Shuxiang Dong,et al.  A two degrees-of-freedom piezoelectric single-crystal micromotor , 2014 .

[19]  Yingxiang Liu,et al.  A rotary piezoelectric motor using bending vibrators , 2013 .

[20]  Soo-Kang Park,et al.  Standing wave brass-PZT square tubular ultrasonic motor. , 2012, Ultrasonics.

[21]  Peng Yan,et al.  Flexure-hinges guided nano-stage for precision manipulations: Design, modeling and control , 2015 .

[22]  Xiaohui Yang,et al.  A Rotary Piezoelectric Actuator Using the Third and Fourth Bending Vibration Modes , 2014, IEEE Transactions on Industrial Electronics.