论文信息 - Defects in Low-k Insulators (κ=2.5 – 2.0): ESR Analysis and Charge Injection - 字舞流文

Defects in Low-k Insulators (κ=2.5 – 2.0): ESR Analysis and Charge Injection

G. Beyer | A. Stesmans | Z. Tokei | M. Baklanov | V. Afanas'ev | M. Jivānescu | A. Nguyen | K. Keunen

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