BiCMOS phototransistors

In this work we present experimental results of silicon-only bipolar phototransistors fabricated in a 0.35μm commercial BiCMOS technology without process modifications. The transistors are characterized over a wide optical spectral range at 410nm, 675nm, 785nm, and 850nm, providing significantly improved -3dB bandwidths up to 390MHz @ 410nm light and responsivities of 1.76A/W @ 675nm corresponding to quantum efficiencies of 359% normalized in terms of the quantum efficiency of a silicon photodiode.

[1]  A. Apsel,et al.  Low-cost, high-efficiency, and high-speed SiGe phototransistors in commercial BiCMOS , 2006, IEEE Photonics Technology Letters.

[2]  C.W. Liu,et al.  A high-performance SiGe-Si multiple-quantum-well heterojunction phototransistor , 2003, IEEE Electron Device Letters.

[3]  Alice Biber,et al.  Avalanche photodiode image sensor in standard BiCMOS technology , 2000 .

[4]  Alfred Grill,et al.  High-speed lateral PIN photodiodes in silicon technologies , 2004, SPIE OPTO.

[5]  T. Heide,et al.  Monolithic high-speed CMOS-photoreceiver , 1999, IEEE Photonics Technology Letters.

[6]  Horst Zimmermann,et al.  Integrated Silicon Optoelectronics , 2010 .

[7]  Andreas G. Andreou,et al.  Mismatch in photodiode and phototransistor arrays , 2000, 2000 IEEE International Symposium on Circuits and Systems. Emerging Technologies for the 21st Century. Proceedings (IEEE Cat No.00CH36353).

[8]  C. Buchal,et al.  Fabrication of ultrafast Si based MSM photodetector , 1998 .

[9]  Alyssa B. Apsel,et al.  Electrical isolation and fanout in intra-chip optical interconnects , 2004, 2004 IEEE International Symposium on Circuits and Systems (IEEE Cat. No.04CH37512).

[10]  J.C. Campbell,et al.  10-Gb/s all-silicon optical receiver , 2003, IEEE Photonics Technology Letters.

[11]  H. Schumacher,et al.  A strained SiGe layer heterojunction bipolar phototransistor for short-range opto-microwave applications , 2003, MWP 2003 Proceedings. International Topical Meeting on Microwave Photonics, 2003..

[12]  A. Grill,et al.  High-speed Germanium-on-SOI lateral PIN photodiodes , 2004, IEEE Photonics Technology Letters.

[13]  James D. Meindl,et al.  Electrical and optical clock distribution networks for gigascale microprocessors , 2002, IEEE Trans. Very Large Scale Integr. Syst..

[14]  S. Chandrasekhar,et al.  A Si BiCMOS transimpedance amplifier for 10-Gb/s SONET receiver , 2001 .