Calibrating Testing and Data Processing of MEMS Rate Gyro

The matching circuit and the principle of the single chip rate gyro,ADXRS150,based on integrated micro electro-mechanical system have been introduced and analyzed.The keystone in design of the rate gyro was explained.The rotational stand for the test to the gyro was built and the calibrating has been carried out.The experimental data recorded by compute has been processed through analyzing.The relationship between the angular rateω and the output voltage V of the gyro is obtained.The error analysis for calibrating test data is presented.The result shows the method of the calibrating test and the data processing on the gyro is available.