The gas sensing characteristics of ITO thin film prepared by sol–gel method

Abstract In this paper, indium tin oxide (ITO) thin films were prepared by sol–gel method. The gas sensing properties of ITO thin films were investigated. The ITO thin films have better sensitivity to ethanol and nitrogen dioxide, but have little response to H2, gasoline, liquid petrol gas (LPG), CH4 and CO, Pd, Pt, CaO, Th2O3 and rare earth elements were added to improve gas sensing characteristics. It was found that the influences of the additives on gas sensing characteristics were slight. The stability of ITO thin films is good.

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