论文信息 - Stable and Reliable Q-Factor in Resonant MEMS with Getter Film - 字舞流文

Stable and Reliable Q-Factor in Resonant MEMS with Getter Film

The objective of this work was to show that the Q-factor of MEMS resonators can be increased and stabilized with the use of getters

A. Fourrier | M. Moraja | G. Longoni | M. Moraja | A. Conte | A. Conte | G. Longoni | A. Fourrier

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