论文信息 - Maskless nano-implant of 20 keV Ga+ in bulk Si(1 0 0) substrates - 字舞流文

Maskless nano-implant of 20 keV Ga+ in bulk Si(1 0 0) substrates

C. Spinella | S. Bauerdick | R. Milazzo | E. Rimini | A. Mio | A. Nadzeyka | L. Peto | G. D'Arrigo