论文信息 - Effect of Oxidation on Conductivity Characteristics of Tungsten-Rhenium Thin-Film Thermocouples Sensor

Effect of Oxidation on Conductivity Characteristics of Tungsten-Rhenium Thin-Film Thermocouples Sensor

This paper reports a temperature sensor based on tungsten-rhenium thin-film thermocouples (TFTCs) to test temperature. Changes in the oxidation process on conductivity of TFTCs have been discussed to optimize the sensor. It will allow the low interference measurement of temperature field under a harsh working environment.

[1] Otto J. Gregory,et al. Thin film thermocouples for advanced ceramic gas turbine engines , 1994 .

[2] H. Jehn. High temperature behaviour of platinum group metals in oxidizing atmospheres , 1984 .

[3] Zhuangde Jiang,et al. Effect of heat treatment on thermoelectric properties of tungsten-rhenium thin-film thermocouples by RF magnetron sputtering , 2018, AIP Advances.

[4] Kenneth G. Kreider,et al. Sputtered high temperature thin film thermocouples , 1993 .

[5] Zhuangde Jiang,et al. Effect of magnetron sputtering parameters on adhesion properties of tungsten-rhenium thin film thermocouples , 2018, Ceramics International.

[6] Na Zhao,et al. Range Analysis of Thermal Stress and Optimal Design for Tungsten-Rhenium Thin Film Thermocouples Based on Ceramic Substrates , 2017, Sensors.

[7] Otto J. Gregory,et al. Stability and Microstructure of Indium Tin Oxynitride Thin Films , 2012 .

[8] T. Clyne,et al. Mechanical stability of DLC films on metallic substrates Part II ? Interfacial toughness, debonding and blistering , 1998 .