Helios 5 DualBeam for Semiconductors

The Thermo Scientific™ Helios™ 5 DualBeam™ family of instruments enables new users to become proficient faster and quickly take advantage of the performance capabilities of this 5th generation FIB/SEM. Automated tool management keeps the system in optimum alignment, ready to deliver the highest performance for both automated and manual usage. Patterning improvements ensure the highest quality depositions at any condition. The Helios 5 delivers the highest resolution STEM imaging in a DualBeam, alongside the fastest ultra-thin TEM sample preparation to meet the challenges of sub 7nm node analysis and beyond. These improvements coupled with our service offerings will make the Helios 5 family the most productive semiconductor lab instruments.