MEMS DC contact micro relays on ceramic substrate for space communication switching network

This paper presented several examples of MEMS ohmic micro relay integration applied to the design of wide band and very low loss basic switching functions. These functions form basic blocks which can be implemented to design more complex networks like switching matrixes. Both CPW and microstrip implementation have been studied and optimized to appraise the most favorable configuration. These devices are fabricated on ceramic alumina substrate, and illustrate the high potential of MEMS technology for reconfigurable space communication systems.

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