CARs blanks feasibility study results for advanced EB reticle fabrication: III

For advanced EB reticle fabrication with CAR blanks, we have been trying blanks life improvement and resolution enhancement. This paper describes several options to extend CAR blanks life by shipping package and storage manners. Dry-N2 purged shipping package and desiccant showed efficiency for PCD improvement. However, desiccant is not available for products since it is not investigated yet if particle contamination could be happened. To extend blanks life after blanks package opened, we blanks maker really recommend the fresh dry-N2 purged box (overflowed) as an ideal storage manner, or regular shipping box storage at least. We tried a BARC as isolator and thinning CAR for resolution enhancement, and found that a neutral-BARC showed an improvement. However, we needs further study about its feasibility, especially for coating uniformity and defect quality control. Thin resist showed almost no improvement for CAR resolution enhancement. To improve CAR performance further, we continuously need the resist-makers cooperation to design and develop a CAR that provides us footing-less pattern profile and long-life after coating.