MOEMS Microlens Technique and Its Application on Lidar

Application and characteristics of MOEMS technique is summarized in this paper.The mechanism of a type of MOEMS optical products is introduced.This technique is likely to miniaturize 3D real time scan imaging lidar.A design instance of MEMS lidar is stressed.Similarities and differences of operating principle between the MEMS lidar and FLASH lidar are compared.Potential performance index of the MEMS lidar is listed.