High Performance Piezoelectric MEMS Microphones.

[1]  B. B. Bauer,et al.  Fundamentals of acoustics , 1963 .

[2]  Richard S. Muller,et al.  Piezoelectric microphone with on-chip CMOS circuits , 1993 .

[3]  B. Auld,et al.  Acoustic fields and waves in solids , 1973 .

[4]  S. Trolier-McKinstry,et al.  Thin Film Piezoelectrics for MEMS , 2004 .

[5]  J. Bjurstrom,et al.  Synthesis of c-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6]  M. Ahmad.  A simple scheme for loss angle measurement of a capacitor , 2004, IEEE Transactions on Energy Conversion.

[7]  Harry F. Tiersten,et al.  Electroelastic equations for electroded thin plates subject to large driving voltages , 1993 .

[8]  Y. Namba,et al.  Resistivity and Temperature Coefficient of Thin Metal Films with Rough Surface , 1970 .

[9]  J. Bergqvist,et al.  A silicon condenser microphone using bond and etch-back technology , 1994 .

[10]  K. Tsubouchi,et al.  Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films , 1985, IEEE Transactions on Sonics and Ultrasonics.

[11]  M. Weinberg.  Working equations for piezoelectric actuators and sensors , 1999 .

[12]  Ieee Standards Board.  IEEE Standard on Piezoelectricity , 1996 .

[13]  S. Timoshenko,et al.  THEORY OF PLATES AND SHELLS , 1959 .

[14]  G. Hess,et al.  New results of micromachined silicon subminiature microphones using piezoelectric polymer layers , 1996, 9th International Symposium on Electrets (ISE 9) Proceedings.

[15]  Robert G. Meyer,et al.  Analysis and Design of Analog Integrated Circuits , 1993 .

[16]  C. K. Lee.  Theory of laminated piezoelectric plates for the design of distributed sensors/actuators. Part I: Governing equations and reciprocal relationships , 1990 .

[17]  Thomas H. Lee,et al.  The Design of CMOS Radio-Frequency Integrated Circuits: RF CIRCUITS THROUGH THE AGES , 2003 .

[18]  M. Royer,et al.  ZnO on Si integrated acoustic sensor , 1983 .

[19]  H. Nyquist.  Thermal Agitation of Electric Charge in Conductors , 1928 .

[20]  Bin Liu,et al.  A new measurement microphone based on MEMS technology , 2003 .

[21]  F.A. Levinzon,et al.  Fundamental noise limit of piezoelectric accelerometer , 2004, IEEE Sensors Journal.

[22]  H. F. Tiersten,et al.  Linear Piezoelectric Plate Vibrations , 1969 .

[23]  W. Newell.  Miniaturization of tuning forks. , 1968, Science.

[24]  J. Johnson.  Thermal Agitation of Electricity in Conductors , 1927, Nature.

[25]  A. Goel,et al.  Design and Performance of Aluminum Nitride Piezoelectric Microphones , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[26]  L. E. Cross,et al.  Performance analysis of piezoelectric cantilever bending actuators , 1998 .

[27]  P. Muralt,et al.  Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin films , 2006 .

[28]  Volume Su.  IEEE Standard on Piezoelectricity , 1984 .

[29]  Gerhard M. Sessler,et al.  Silicon subminiature microphones with organic piezoelectric layers: fabrication and acoustical behaviour , 1991 .

[30]  Viggo Tarnow.  The lower limit of detectable sound pressures , 1987 .

[31]  A. Pisano,et al.  Modeling and optimal design of piezoelectric cantilever microactuators , 1997 .

[32]  A. Petri,et al.  Acoustic investigation of the elastic properties of ZnO films , 1987 .

[33]  F. P. Mechel.  Notes on the radiation impedance, especially of piston-like radiators , 1988 .

[34]  Michael Krommer,et al.  On the correction of the Bernoulli-Euler beam theory for smart piezoelectric beams , 2001 .

[35]  A silicon cantilever beam structure for the evaluation of d31, d33 and e31 piezoelectric coefficients of PZT thin films , 2007, 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics.

[36]  Thin Film ZnO-MOS Transducer with Virtually DC Response , 1980 .

[37]  T. Gabrielson.  Mechanical-thermal noise in micromachined acoustic and vibration sensors , 1993 .

[38]  Michael Krommer,et al.  On the influence of the electric field on free transverse vibrations of smart beams , 1999 .

[39]  Gisela Hess,et al.  A subminiature condenser microphone with silicon nitride membrane and silicon back plate , 1989 .

[40]  H. Callen,et al.  Irreversibility and Generalized Noise , 1951 .

[41]  D. Remiens,et al.  Mechanical properties determined by nanoindentation tests of [Pb(Zr,Ti)O3] and [Pb(Mg1/3Nb2/3)1−xTixO3] sputtered thin films , 2006 .

[42]  Kazuhiro Suzuki,et al.  First-Principles Study on Piezoelectric Constants in Strained BN, AlN, and GaN , 1998 .

[43]  Paul Muralt,et al.  Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films , 1999 .

[44]  T. Ren,et al.  A novel ferroelectric based microphone , 2003 .

[45]  P. Muralt,et al.  Thickness dependence of the properties of highly c-axis textured AlN thin films , 2004 .

[46]  L. E. Cross,et al.  Nonlinear piezoelectric behavior of ceramic bending mode actuators under strong electric fields , 1999 .

[47]  Balakumar Balachandran,et al.  Sensor diaphragm under initial tension: Linear analysis , 2005 .

[48]  E. Beyne,et al.  Pulsed DC Sputtered Aluminum Nitride: A Novel Approach To Control Stress And C-axis Orientation , 2004 .

[49]  D. Clarke,et al.  Sputtered AlN thin films on Si and electrodes for MEMS resonators: relationship between surface quality microstructure and film properties , 2003, IEEE Symposium on Ultrasonics, 2003.

[50]  Nader Jalili,et al.  On the nonlinear-flexural response of piezoelectrically driven microcantilever sensors , 2009 .

[51]  Wang Ling,et al.  Noise of the JFET Amplifier , 2003 .

[52]  H. Abramovich,et al.  The electromechanical response of multilayered piezoelectric structures , 2004, Journal of Microelectromechanical Systems.