MEMS tunable Michelson interferometer with robust beam splitting architecture

A new beam splitter [1] is proposed to realize a completely integrated Michelson interferometer, where a single medium interface (Si/Air) is used for optical beam splitting. This offers a stable splitting ratio over a very wide spectral range. Using this technique on SOI wafers, with a moving mirror, a highly robust and tunable interferometer is fabricated. The tunable interferometer is tested experimentally by measuring optical interference versus mirror displacement.

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