EXPERIMENTAL APPLICATION OF l1-OPTIMAL CONTROL IN ATOMIC FORCE MICROSCOPY

Abstract This paper presents an experimental application of l 1 -optimal control. In an atomic force microscope, the vertical position of the piezoelectric tube scanner and thus the cantilever deflection is controlled using a 2-degree-of-freedom control design. The last recorded scan line is fed forward whereas a feedback controller provides stability and setpoint control. Experimental results verify the performance of the approach and give insight into applicability design, and implementation aspects of l 1 -optimal controllers.

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