Multifunctional interferometric platform for on-chip testing of the micromechanical properties of MEMS/MOEMS

We have developed a multifunctional interferometric platform for testing MEMS/MOEMS, measuring the 3-D out-of-plane deflections and providing both material properties and motion behaviour of microdevices. Specific metrology procedures have been demonstrated to determine respectively and residual stress of silicon membranes compressively prestressed by SiOxNy PECVD deposition study of vibration modes of PZT microactuators as well as the expertise of Scratch Drive Actuators.