论文信息 - An XPS study of the composition of iridium films obtained by MO CVD - 字舞流文

An XPS study of the composition of iridium films obtained by MO CVD

A. Boronin | M. Smirnov | V. I. Bukhtiyarov | I. Prosvirin | I. Igumenov | N. Gelfond | R. I. Kwon | V. Bukhtiyarov