论文信息 - A novel hinged micromachined high-g piezoresistive accelerometer

A novel hinged micromachined high-g piezoresistive accelerometer

A novel silicon micromachined hinged high-g piezoresistive accelerometer with wide bandwidth is presented. The sensitivity of this accelerometer can be improved while maintaining a high resonance frequency. Based on the simulation of the finite element method, design parameters are obtained for a natural resonance frequency of 573kHz for a large range of 200,000g. The high-g accelerometer is fabricated by advanced silicon bulk micromachining technology. By using a dropping-hammer testing system, characterization measurements show a sensitivity of 0.502μV/g for a 30646g shock acceleration under the 5V excitation.

Lufeng Che | Yuelin Wang | Bin Xiong | Kebin Fan

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