Spectrally-resolved near-field investigation of proton implanted vertical cavity surface emitting lasers

Emission characteristics of proton implanted vertical cavity surface emitting lasers have been studied by spectrally-resolved near-field scanning optical microscopy (NSOM). Measured spatial intensity distributions of individual transverse modes show a fundamental mode at threshold, and two double-lobed first-order modes excited around aperture edge above 1.3× threshold injection current. The use of high spectral and spatial resolution NSOM enabled the detection of a local resonance wavelength dependence on position across the laser aperture; from these data, a lateral refractive index variation is calculated. As the injection current is increased, these index distributions are found to be consistent with the observed reduction of the spatial width of the intensity distribution and the increase in the spectral mode spacing.

[1]  C. C. Bahr,et al.  Imaging InGaAsP quantum-well lasers using near-field scanning optical microscopy , 1994 .

[2]  Elias Towe,et al.  Near-field optical studies of semiconductor heterostructures and laser diodes , 1995 .

[3]  John G. McInerney,et al.  Transverse-mode control of vertical-cavity surface-emitting lasers , 1996 .

[4]  Daryoosh Vakhshoori,et al.  Top‐surface emitting lasers with 1.9 V threshold voltage and the effect of spatial hole burning on their transverse mode operation and efficiencies , 1993 .

[5]  Rajaram Bhat,et al.  Optical properties of AlxGa1−x As , 1986 .

[6]  E. B. McDaniel,et al.  An impedance based non‐contact feedback control system for scanning probe microscopes , 1996 .

[7]  Karl Joachim Ebeling,et al.  Spectrally resolved near‐field mode imaging of vertical cavity semiconductor lasers , 1996 .

[8]  Near field measurements of optical channel waveguide structures , 1995 .

[9]  Kent D. Choquette,et al.  Selectively oxidised vertical cavity surface emitting lasers with 50% power conversion efficiency , 1995 .

[10]  Kenichi Iga,et al.  Record low-threshold index-guided InGaAs/GaAlAs vertical-cavity surface-emitting laser with a native oxide confinement structure , 1995 .

[11]  John E. Bowers,et al.  Modal reflection of quarter-wave mirrors in vertical-cavity lasers , 1993 .

[12]  D. M. Kuchta,et al.  Spatial hole burning and self‐focusing in vertical‐cavity surface‐emitting laser diodes , 1994 .

[13]  Werner Wegscheider,et al.  Optical spectroscopy of a GaAs/AlGaAs quantum wire structure using near-field scanning optical microscopy , 1994 .

[14]  Karl Joachim Ebeling,et al.  Planar proton implanted VCSEL's and fiber-coupled 2-D VCSEL arrays , 1995 .