An overview and a contribution to the optical measurement of linear displacement

The present work is a contribution to the field of linear displacement measurements by optical means. For that purpose, a brief overview of some existing solutions is presented and two systems for axial linear displacement measurement based on light intensity detection are introduced. The systems have redundancy and were designed with the purpose of achieving identification and automatic correction of errors arising from inadvertent angular variations between the sensor and the light beam positions.

[1]  J. A. Brandão Faria,et al.  Automated characterization of a bifurcated optical fiber bundle displacement sensor taking into account reflector tilting perturbation effects , 2000 .

[2]  M Kawakita,et al.  Axi-vision camera (real-time distance-mapping camera). , 2000, Applied optics.

[3]  J B Khurgin,et al.  Displacement measurement that uses transient photoelectromotive force effects in CdTe:V with frequency-modulated lasers. , 2000, Applied optics.

[4]  T Suzuki,et al.  Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer. , 2000, Applied optics.

[5]  J. H. Bae,et al.  Gap measurement by position-sensitive detectors. , 2000, Applied optics.

[6]  J Ares,et al.  Position and displacement sensing with shack-hartmann wave-front sensors. , 2000, Applied optics.

[7]  R. Feiel,et al.  High-resolution laser speckle correlation for displacement and strain measurement. , 2000, Applied optics.

[8]  D. Sagrario,et al.  Axial and angular displacement fiber-optic sensor. , 1998, Applied optics.

[9]  G. Kirk Davis,et al.  Accuracy of position detection using a position-sensitive detector , 1998, IEEE Trans. Instrum. Meas..

[10]  José Brandão Faria,et al.  A theoretical analysis of the bifurcated fiber bundle displacement sensor , 1998, IEEE Trans. Instrum. Meas..

[11]  O. Postolache,et al.  An ANN fault detection procedure applied in virtual measurement systems case , 1998, IMTC/98 Conference Proceedings. IEEE Instrumentation and Measurement Technology Conference. Where Instrumentation is Going (Cat. No.98CH36222).

[12]  Ilene J. Busch‐Vishniac,et al.  Noise analysis for position-sensitive detectors , 1997 .

[13]  Risto Myllylä,et al.  Displacement sensing resolution of position-sensitive detectors in atmospheric turbulence using retroreflected beam , 1997 .

[14]  Elvira Fortunato,et al.  Interpretation of the static and dynamic characteristics of 1-D thin film position sensitive detectors based on a-Si:H p-i-n diodes , 1996 .

[15]  Silvano Donati,et al.  A PC-interfaced, compact laser-diode feedback interferometer for displacement measurements , 1996 .

[16]  A. Bergamin,et al.  Beam-astigmatism in laser interferometry , 1996, Proceedings of 20th Biennial Conference on Precision Electromagnetic Measurements.

[17]  Risto Myllylä,et al.  Positioning resolution of the position-sensitive detectors in high background illumination , 1996 .

[18]  U. Minoni,et al.  Fiber-linked interferometric displacement sensor: analysis of residual sensitivity to fiber stress , 1996 .

[19]  Gary Cloud,et al.  Optical Methods of Engineering Analysis , 1996 .

[20]  Risto Myllylä,et al.  A high-resolution lateral displacement sensing method using active illumination of a cooperative target and a focused four-quadrant position-sensitive detector , 1995 .

[21]  Ilene J. Busch‐Vishniac,et al.  Position detection of multiple light beams using phase detection , 1994 .

[22]  J. Haslett,et al.  Source width insensitive optical position sensor , 1994 .

[23]  M. Tanaka,et al.  Noise reduction in an optical interferometer for picometer measurements , 1994 .

[24]  Antonio Pietrosanto,et al.  A neural network approach to instrument fault detection and isolation , 1994, Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9).

[25]  J. W. Haslett,et al.  High-resolution position sensor based on two sensing elements , 1993 .

[26]  B. G. Zagar A laser-interferometer measuring displacement with nanometer resolution , 1993, 1993 IEEE Instrumentation and Measurement Technology Conference.

[27]  U. Minoni,et al.  Optical interferometer using a high-birefringence optical fiber , 1993 .

[28]  Ilene J. Busch‐Vishniac,et al.  A method for measurement of multiple light spot positions on one position-sensitive detector (PSD) , 1993 .

[29]  S. R. Lang,et al.  Position sensing using an optical potentiometer , 1992, [1992] Conference Record IEEE Instrumentation and Measurement Technology Conference.

[30]  A. Dutta,et al.  Design and performance of the mesh-type high-speed silicon optical position-sensitive devices , 1991 .

[31]  J. Dukes,et al.  A two-hundred-foot yardstick with graduations every microinch , 1991 .

[32]  I. A. Sokolov,et al.  Non‐steady‐state photo‐electromotive‐force induced by dynamic gratings in partially compensated photoconductors , 1990 .

[33]  James W. Haslett,et al.  A low cost high resolution optical position sensor , 1990 .

[34]  T. Yamashita,et al.  Microdisplacement sensor using a polarization-maintaining optical fiber , 1990 .

[35]  M F Laguesse,et al.  Optical potentiometer using fluorescent optical fiber for position measurement. , 1989, Applied optics.

[36]  I. Busch-Vishniac,et al.  The linearity and sensitivity of lateral effect position sensitive devices-an improved geometry , 1989 .

[37]  Takeo Saegusa,et al.  A phase encoding method for improving the resolution and reliability of laser interferometers (displacement measurement) , 1989 .

[38]  M. Tanaka,et al.  Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels (dimension measurement) , 1989 .

[39]  R. Stolen,et al.  Single-mode fiber components , 1987, Proceedings of the IEEE.

[40]  R. R. Baldwin,et al.  Some Recent Developments in Laser Interferometry , 1987 .

[41]  K. Nakayama,et al.  A New Optical Interferometer for Absolute Measurement of Linear Displacement in the Subnanometer Range , 1983 .

[42]  Hirokazu Matsumoto,et al.  Automatic Recording Laser Interferometer for Line Standards up to 2 m , 1980 .

[43]  S. Bennett,et al.  An absolute interferometric dilatometer , 1977 .

[44]  J. Wallmark A New Semiconductor Photocell Using Lateral Photoeffect , 1957, Proceedings of the IRE.