Integrated Chemical Fuel Microprocessor for Power Generation in MEMS Applications

Abstract : This document reports results obtained via Integrated Chemical Fuel Microprocessor for Power Generation in MEMS Applications" during the performance period, 1 September 1999 - 31 March 2004. The overall goal of this program was to demonstrate a chemical fuel processing microsystem for power generation in MEMS applications. The program had several major accomplishments: 1. Development and fabrication of a new, thermally efficient, suspended tube MEMS heat exchanger/fuel processor. 2. Design and fabrication of a thermoelectric (TE) MEMS device for direct conversion of catalytic combustion energy into electrical power. 3. Demonstration of integration of the suspended tube MEMS heat exchanger/fuel processor and GaSb solar cell into the first MEMS based thermophotovoltaic (TPV) system with net energy output. 4. Development of MEMS devices for hydrogen purification, such as removing unreacted fuels. 5. Evaluation of system performance for different fuels and configurations. 6. Exploration of microfabricated entrainment based pumps as potential options for air injection in microburner systems.

[1]  K. Jensen,et al.  Palladium-based micromembranes for hydrogen separation: Device performance and chemical stability , 2004 .

[2]  K. Jensen,et al.  A thermophotovoltaic micro-generator for portable power applications , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[3]  K. Jensen.  Towards Integrated Microsystems for Chemical Synthesis , 2002 .

[4]  K. Jensen,et al.  Combustion-assisted hydrogen production in a high-temperature chemical reactor/heat exchanger for portable fuel cell applications , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[5]  Klavs F. Jensen,et al.  A microfabricated suspended-tube chemical reactor for thermally efficient fuel processing , 2003 .

[6]  K. Jensen,et al.  A microfabricated suspended-tube chemical reactor for fuel processing , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[7]  Klavs F. Jensen,et al.  Isotropic etching of silicon in fluorine gas for MEMS micromachining , 2007 .

[8]  K. Jensen,et al.  A Combustion-Based MEMS Thermoelectric Power Generator , 2001 .