论文信息 - Atomic Layer Deposition of Molybdenum Disulfide Films Using MoF 6 and H 2 S - 字舞流文

Atomic Layer Deposition of Molybdenum Disulfide Films Using MoF 6 and H 2 S

David J. Mandia | Y. Lei | E. Graugnard | A. Mane | J. Elam | Steven Letourneau | Q. Peng | J. Libera | Jian Liu | Qing Peng