On the corrupting influence of variability in semiconductor manufacturing

This paper describes two simulation experiments using a model of a real medium sized multi-product semiconductor chip fabrication facility. The results presented clearly show the corrupting influence of variability, in this case caused by machine and tool unavailability. The immediate conclusion out of the results is that reducing the inherent variability of a manufacturing system improves the overall system performance. Hence, sampling shop-floor data should not only include first order statistics, but also measures that allow to monitor and model the variability of the machinery.

[1]  Manfred Mittler.  The variability of cycle times in semiconductor manufactoring , 1996 .

[2]  Bhaba R. Sarker,et al.  A Review of:“Factory Physics: Foundations of Manufacturing Management” Wallace J. Hopp and Mark L. Spearman Richard D. Irwin, Inc., 1996 , 1997 .

[3]  Robert W. Atherton,et al.  Wafer Fabrication: Factory Performance and Analysis , 1995 .

[4]  Robert C. Wolpert,et al.  A Review of the , 1985 .

[5]  F. G. Boebel,et al.  Cycle time reduction program at ACL , 1996, IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings.

[6]  Reha Uzsoy,et al.  A REVIEW OF PRODUCTION PLANNING AND SCHEDULING MODELS IN THE SEMICONDUCTOR INDUSTRY PART I: SYSTEM CHARACTERISTICS, PERFORMANCE EVALUATION AND PRODUCTION PLANNING , 1992 .

[7]  John W. Fowler,et al.  Measurable improvements in cycle-time-constrained capacity , 1997, 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023).

[8]  P. J. Miller,et al.  The operating curve: a method to measure and benchmark manufacturing line productivity , 1997, 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings.

[9]  Wallace J. Hopp,et al.  Factory physics : foundations of manufacturing management , 1996 .

[10]  John W. Fowler,et al.  Measurement and improvement of manufacturing capacities (MIMAC): Final report , 1995 .

[11]  Steven Brown.  A Centralized Approach to Factory Simulation , 1997 .

[12]  S. Wittevrongel,et al.  Queueing Systems , 2019, Introduction to Stochastic Processes and Simulation.

[13]  Leonard Kleinrock,et al.  Theory, Volume 1, Queueing Systems , 1975 .

[14]  Manfred Mittler,et al.  Reducing The Variance Of Cycle Times In Semiconductor Manufacturing Systems , 1995 .

[15]  Reha Uzsoy,et al.  A review of production planning and scheduling models in the semiconductor industry , 1994 .