Tests With Soft X-rays of an Improved Monolithic SOI Active Pixel Sensor

We have been developing monolithic active pixel sensors with 0.2 μm Silicon-On-Insulator (SOI) CMOS technology, called SOIPIX, for high-speed wide-band X-ray imaging spectroscopy on future astronomical satellites. In this work, we investigate a revised chip (XRPIX1b) for soft X-rays used in frontside illumination. The Al Kα line at 1.5 keV is successfully detected and energy resolution of 188 eV (FWHM) is achieved from a single pixel at this energy. The responsivity is improved to 6 μV/electron and the readout noise is 18 electrons rms. Data from 3 ×3 pixels irradiated with 6.4 keV (Fe Kα) X-rays demonstrates that the circuitry crosstalk between adjacent pixels is less than 0.5%.

[1]  Mark W. Bautz,et al.  Advanced CCD imaging spectrometer (ACIS) instrument on the Chandra X-ray Observatory , 2003, SPIE Astronomical Telescopes + Instrumentation.

[2]  A. Soares,et al.  Characterization of Three-Dimensional-Integrated Active Pixel Sensor for X-Ray Detection , 2009, IEEE Transactions on Electron Devices.

[3]  Alexander Stefanescu,et al.  The IXO wide-field imager , 2010, Astronomical Telescopes + Instrumentation.

[4]  R. Kohrs,et al.  New results on DEPFET pixel detectors for radiation imaging and high energy particle detection , 2004, IEEE Transactions on Nuclear Science.

[5]  K. Hara,et al.  Development of SOI pixel process technology , 2011 .

[6]  M. Porro,et al.  First Readout of a 64 $\times$ 64 DEPFET Matrix With VELA Circuit , 2009, IEEE Transactions on Nuclear Science.

[7]  D. Bisello,et al.  Characterisation of a thin, fully-depleted, back-illuminated SOI pixel sensor with soft X-ray radiation , 2011, 2011 IEEE Nuclear Science Symposium Conference Record.

[8]  J. A. Gregory,et al.  X-Ray Imaging Spectrometer (XIS) on Board Suzaku , 2007 .

[9]  Dario Bisello,et al.  Characterisation of a Thin Fully Depleted SOI Pixel Sensor with Soft X-ray Radiation , 2011, 1111.2151.

[10]  Atsushi Iwata,et al.  First Performance Evaluation of an X-Ray SOI Pixel Sensor for Imaging Spectroscopy and Intra-Pixel Trigger , 2011, IEEE Transactions on Nuclear Science.

[11]  M. Trimpl,et al.  New results on DEPFET pixel detectors for radiation imaging and high energy particle detection , 2003, 2003 IEEE Nuclear Science Symposium. Conference Record (IEEE Cat. No.03CH37515).

[12]  Y. Arai,et al.  Development of a built-in analog-to-digital converter for a X-ray astronomy detector with the SOI CMOS technology , 2011, 2011 IEEE Nuclear Science Symposium Conference Record.

[13]  Stefan Kraft,et al.  The physics of the low-energy tail in the ACIS CCD: The spectral redistribution function , 2000 .

[14]  Elmar Pfeffermann,et al.  The European Photon Imaging Camera on XMM-Newton: The pn-CCD camera , 2001 .

[15]  Atsushi Iwata,et al.  Progress in Development of Monolithic Active Pixel Detector for X-ray Astronomy with SOI CMOS Technology , 2012 .