Algorithm for the determination of intrinsic optical constants of metal films: application to aluminum.

Optical and electron-energy-loss data for evaporated-aluminum films have been critically analyzed and used in an iterative, self-consistent algorithm that represents a combination of the Kramers-Kronig analysis and the semiquantum-model application. The novel values of the intrinsic optical functions of aluminum have been determined in a wide spectral range from 200 µm (6.2 meV) to 0.12 nm (10 keV). These functions are in accordance with recent calculations by Lee and Chang [Phys. Rev. B 49, 2362 (1994)], with dc conductivity measurements, and are in good agreement with both peak positions and line widths obtained from electron-energy-loss experiments. The results are examined for internal consistency by inertial and f-sum rules.

[1]  Lee,et al.  First-principles study of the optical properties and the dielectric response of Al. , 1994, Physical review. B, Condensed matter.

[2]  D. R. Penn,et al.  Use of sum rules on the energy-loss function for the evaluation of experimental optical data , 1993 .

[3]  Collins,et al.  Evolution of the optical functions of thin-film aluminum: A real-time spectroscopic ellipsometry study. , 1993, Physical review. B, Condensed matter.

[4]  P. McMarr,et al.  Roughness measurements of Si and Al by variable angle spectroscopic ellipsometry. , 1991, Applied optics.

[5]  A. Rakić,et al.  Determination of optical properties of aluminium including electron reradiation in the Lorentz-Drude model , 1990 .

[6]  Aleksandar D. Rakic,et al.  Determination of the reflection coefficients of laser light of wavelengths lambda(0.22 microm,200 microm) from the surface of aluminum using the Lorentz-Drude model. , 1990, Applied optics.

[7]  B E Newnam,et al.  Extreme ultraviolet reflectance degradation of aluminum and silicon from surface oxidation. , 1988, Applied optics.

[8]  S. Rashkeev,et al.  First-principles calculations of the optical properties of metals , 1988 .

[9]  R. J. Bell,et al.  Optical properties of Al, Fe, Ti, Ta, W, and Mo at submillimeter wavelengths. , 1988, Applied optics.

[10]  P Z Takacs,et al.  Optical constants for thin films of C, diamond, Al, Si, and CVD SIC from 24 A to 1216 A. , 1988, Applied optics.

[11]  Z. Bodó,et al.  Intrinsic optical constants of aluminum. , 1987, Applied optics.

[12]  Smith,et al.  Intraband and interband processes in the infrared spectrum of metallic aluminum. , 1986, Physical review. B, Condensed matter.

[13]  P. McMarr,et al.  Roughness measurements by spectroscopic ellipsometry. , 1985, Applied optics.

[14]  D. Jiles,et al.  Piezo optic properties of aluminum , 1983 .

[15]  Frank Szmulowicz,et al.  Calculation of optical spectra of aluminum , 1981 .

[16]  W. E. Lawrence,et al.  Intraband optical conductivity sigma/omega,T/ of Cu, Ag, and Au - Contribution from electron-electron scattering , 1981 .

[17]  Taizo Sasaki,et al.  Self-consistency and sum-rule tests in the Kramers-Kronig analysis of optical data: Applications to aluminum , 1980 .

[18]  David Y. Smith,et al.  Finite-energy f -sum rules for valence electrons , 1978 .

[19]  J. Callaway,et al.  Self-consistent energy bands in aluminum: An improved calculation , 1977 .

[20]  P. Bunyan,et al.  Calculation of the bandstructure of aluminium using the model potential method , 1977 .

[21]  Frederick W. King Sum rules for the optical constants , 1976 .

[22]  C. Kunz,et al.  Optical constants from the far infrared to the x-ray region: Mg, Al, Cu, Ag, Au, Bi, C, and Al 2 O 3 , 1975 .

[23]  N. Ashcroft,et al.  Nonlocal effects in absorption edges: Energy-dependent pseudopotentials , 1974 .

[24]  A. Bianconi,et al.  Role of the density of conduction states on the L 2 , 3 absorption spectrum of aluminum , 1974 .

[25]  David Y. Smith,et al.  Superconvergence and sum rules for the optical constants: Physical meaning, comparison with experiment, and generalization , 1974 .

[26]  David Y. Smith,et al.  Superconvergence and Sum Rules for the Optical Constants , 1972 .

[27]  W. E. Spicer,et al.  Study of Aluminum Films. I. Optical Studies of Reflectance Drops and Surface Oscillations on Controlled-Roughness Films , 1971 .

[28]  A. Mathewson,et al.  Absolute Values of the Optical Constants of Some Pure Metals , 1971 .

[29]  N. Ashcroft,et al.  Interband Absorption and the Optical Properties of Polyvalent Metals , 1971 .

[30]  C. Gähwiller,et al.  Photoabsorption near the L I I , I I I Edge of Silicon and Aluminum , 1970 .

[31]  C. Powell Analysis of Optical- and Inelastic-Electron-Scattering Data. II. Application to Al*† , 1970 .

[32]  R. Haensel,et al.  Contribution of L Shell to the Total Absorption Cross Section in Aluminum , 1969 .

[33]  R. W. Ditchburn,et al.  The optical constants of aluminium from 12 to 36 eV , 1966, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[34]  W. Harrison Parallel-Band Effects in Interband Optical Absorption , 1966 .

[35]  William Ralph Hunter,et al.  Optical Constants of Metals in the Extreme Ultraviolet. II. Optical Constants of Aluminum, Magnesium, and Indium at Wavelengths Shorter than Their Critical Wavelengths* , 1964 .

[36]  H. Ehrenreich,et al.  Optical Constants in the X‐Ray Range , 1964 .

[37]  H. Ehrenreich,et al.  Optical Properties of Aluminum , 1963 .

[38]  H. E. Bennett,et al.  Infrared Reflectance of Aluminum Evaporated in Ultra-High Vacuum , 1963 .

[39]  W. Harrison Electronic Structure and the Properties of Metals. II. Application to Zinc , 1963 .

[40]  H. Ehrenreich,et al.  Optical Properties of Ag and Cu , 1962 .

[41]  G. Hass,et al.  Optical Constants and Reflectance and Transmittance of Evaporated Aluminum in the Visible and Ultraviolet , 1961 .

[42]  Shepard Roberts,et al.  Optical Properties of Nickel and Tungsten and Their Interpretation According to Drude's Formula , 1959 .

[43]  Franz C. Jahoda,et al.  Fundamental Absorption of Barium Oxide from Its Reflectivity Spectrum , 1957 .

[44]  F. Tangherlini,et al.  Optical Constants of Silver, Gold, Copper, and Aluminum. II. The Index of Refraction n , 1954 .

[45]  L. Schulz,et al.  The Optical Constants of Silver, Gold, Copper, and Aluminum. I. The Absorption Coefficient k , 1954 .