FLEXIBLE POLYIMIDE FILM TECHNOLOGY FOR VIBRATION ENERGY HARVESTING

In this paper we present recent developments of an electromagnetic vibration energy harvester based on micro-machined flexible polyimide films and planar micro-coils. A range of different prototype resonator structures were successfully fabricated with resonance frequencies in the range of 200 Hz to 400 Hz. A fully assembled prototype generator device produced an output power of 5 µW (70 mV at 1000 Ω) of peak power from a harmonic input excitation of 9g (15 µm amplitude at 390 Hz).