Absolute two-dimensional sub-micron metrology for electron beam lithography: A calibration theory with applications☆

[1]  D. Hilbert,et al.  Geometry and the Imagination , 1953 .

[2]  D. Luenberger.  Optimization by Vector Space Methods , 1968 .

[3]  Åke Björck,et al.  Numerical Methods , 2021, Markov Renewal and Piecewise Deterministic Processes.

[4]  J. W. Humberston.  Classical mechanics , 1980, Nature.

[5]  Philip E. Gill,et al.  Practical optimization , 1981 .

[6]  Peter John Lawson,et al.  Calibration algorithms for an electron beam metrology system , 1983 .

[7]  Gene H. Golub,et al.  Matrix computations , 1983 .

[8]  John E. Dennis,et al.  Numerical methods for unconstrained optimization and nonlinear equations , 1983, Prentice Hall series in computational mathematics.