Microflow devices for miniaturized chemical analysis systems
暂无分享，去创建一个
In the development of chemical analysis systems a clear trend exists towards miniaturization using silicon micromachining. This paper reports on microflow devices such as microvalves, micropumps and bioreactors developed for the application to analytical chemistry. As examples, the design and performance of integrated enzyme-based analysis systems for the determination of gas-phase ethanol will be described.
[1] K.E. Petersen,et al. Silicon as a mechanical material , 1982, Proceedings of the IEEE.
[2] Phillip W. Barth,et al. Silicon fusion bonding for fabrication of sensors, actuators and microstructures , 1990 .
[3] Juergen Hesselbach,et al. Silicon microgripper for microassembly realized by photolithography and fast anisotropic silicon etching , 1998, Other Conferences.