X-ray determination of strain and texture in sputtered molybdenum and titanium films on silicon
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[1] T. Adler,et al. Affect of annealing on uniform and nonuniform strains in a sputtered Mo film on Si , 1979 .
[2] A. G. Blachman. Stress and resistivity control in sputtered molybdenum films and comparison with sputtered gold , 1971 .
[3] B. Warren,et al. X-Ray Diffraction , 2014 .
[4] C. J. Smithells,et al. Metals reference book , 1949 .