论文信息 - Closed-Loop Characterization of Noise and Stability in a Mode-Localized Resonant MEMS Sensor - 字舞流文

Closed-Loop Characterization of Noise and Stability in a Mode-Localized Resonant MEMS Sensor

A. Seshia | G. Sobreviela | Sijun Du | Chun Zhao | Milind Pandit | X. Zou | Arif Mustafazade | S. Du | Milind S. Pandit