论文信息 - Realization of preferential (100) oriented AlN thin films on Mo coated Si substrate using reactive RF magnetron sputtering - 字舞流文

Realization of preferential (100) oriented AlN thin films on Mo coated Si substrate using reactive RF magnetron sputtering

D. Nair | A. DasGupta | M. Rao | Martando Rath | M. S. Ramachandra Rao | A. Das | M. Rath | A. Das