50-mJ, 1-kHz Yb:YAG thin-disk regenerative amplifier with 969-nm pulsed pumping

We are developing a 100-mJ Yb:YAG thin-disk regenerative amplifier operating at 1-kHz repetition rate pumped at zero-phonon-line (968.825-nm1) and delivering 1-2 ps pulses for EUV plasma sources applicable in science and industry. Recently we achieved the output energy of nearly 50-mJ from a single laser-head cavity with good beam quality (M2<1.2) as well as stable beam-pointing (<4μrad). Applying pulsed pumping with the pulse duration shorter than the upper state lifetime of Yb:YAG helps to reduce the ASE and thermal loading of the thin-disk.