论文信息 - First demonstration of ferroelectric Si:HfO2 based 3D FE-FET with trench architecture for dense nonvolatile memory application - 字舞流文

First demonstration of ferroelectric Si:HfO2 based 3D FE-FET with trench architecture for dense nonvolatile memory application

J. V. Houdt | J. van Houdt | A. Milenin | S. Mcmitchell | G. V. D. Bosch | G. Van den bosch | K. Banerjee | L. Breuil | M. Pak | J. Stiers | L. di Piazza | L. Piazza