论文信息 - Patterning of hydrogen-passivated Si(100) using Ar(3P0,2) metastable atoms - 字舞流文

Patterning of hydrogen-passivated Si(100) using Ar(3P0,2) metastable atoms

G. K. Walters | R. Celotta | H. Craighead | F. Dunning | J. McClelland | S. Hill | C. Haich