Functional photocatalytically active and scratch resistant antireflective coating based on TiO2 and SiO2

Abstract Antireflection (AR) multilayer coating, based on combination of five TiO 2 and SiO 2 thin films, was deposited by microwave assisted reactive magnetron sputtering process on microscope glass substrates. In this work X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy and wettability measurements were used to characterize the structural and surface properties of the deposited coating. These studies revealed that prepared coating was amorphous with low surface roughness. Photocatalytic properties were determined based on phenol decomposition reaction. Measurements of optical properties showed that transmittance in the visible wavelength range was increased after the deposition of AR coating as-compared to bare glass substrate. The mechanical properties were determined on the basis of nano-indentation and scratch resistance tests. Performed research has shown that deposition of an additional thin 10 nm thick TiO 2 thin film top layer, the prepared AR coating was photocatalytically active, hydrophobic, scratch resistant and had increased hardness as-compared to bare glass substrate. These results indicate that prepared AR multilayer could be used also as a self-cleaning and protective coating.

[1]  Joachim Dr Szczyrbowski,et al.  Large-scale antireflective coatings on glass produced by reactive magnetron sputtering , 1993 .

[2]  T. Schmauder,et al.  Hard coatings by plasma CVD on polycarbonate for automotive and optical applications , 2006 .

[3]  J. Gómez‐Herrero,et al.  WSXM: a software for scanning probe microscopy and a tool for nanotechnology. , 2007, The Review of scientific instruments.

[4]  Huajian Gao,et al.  Elastic contact versus indentation modeling of multi-layered materials , 1992 .

[5]  G. Pharr,et al.  An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments , 1992 .

[6]  G. Wei,et al.  Antireflective coatings with adjustable transmittance and high laser-induced damage threshold prepared by deposition of magnesium fluoride nanoparticles , 2015 .

[7]  Mariusz Martyniuk,et al.  Determination of mechanical properties of silicon nitride thin films using nanoindentation , 2005, SPIE Defense + Commercial Sensing.

[8]  Jun Shen,et al.  Sol–gel derived durable antireflective coating for solar glass , 2010 .

[9]  Mohd Zubir Mat Jafri,et al.  Enhancement of silicon solar cell efficiency by using back surface field in comparison of different antireflective coatings , 2014 .

[10]  N. Liang,et al.  Hardness Measurement and Evaluation of Double-layer Films on Material Surface , 2003 .

[11]  Frank Placido,et al.  Determination of optical and mechanical properties of Nb2O5 thin films for solar cells application , 2014 .

[12]  Seeram Ramakrishna,et al.  Porous SiO2 anti-reflective coatings on large-area substrates by electrospinning and their application to solar modules , 2013 .

[13]  Geunsik Lee,et al.  Anti-reflection porous SiO2 thin film deposited using reactive high-power impulse magnetron sputtering at high working pressure for use in a-Si:H solar cells , 2014 .

[14]  D. Kaczmarek,et al.  Influence of Nd dopant amount on microstructure and photoluminescence of TiO2:Nd thin films , 2015 .

[15]  V. Sahajwalla,et al.  Influence of CaO-SiO2-Al2O3 Ternary Oxide System on the Reduction Behavior of Carbon Composite Pellet: Part II. Morphological Properties , 2013, Metallurgical and Materials Transactions B.

[16]  D. Kaczmarek,et al.  Influence of the structural and surface properties on photocatalytic activity of TiO2:Nd thin films , 2015 .

[17]  Bo Jiang,et al.  Sol–gel preparation of SiO2/TiO2/SiO2–TiO2 broadband antireflective coating for solar cell cover glass , 2013 .

[18]  D. Kaczmarek,et al.  Investigation of structural, optical and micro-mechanical properties of (NdyTi1 − y)Ox thin films deposited by magnetron sputtering , 2015 .

[19]  M. Śmietana,et al.  Simulation of nanoindentation experiments of single‐layer and double‐layer thin films using finite element method , 2014 .

[20]  Harish C. Barshilia,et al.  High performance single layer nano-porous antireflection coatings on glass by sol-gel process for solar energy applications , 2015 .

[21]  Thin Films Based on Nanocrystalline TiO_{2} for Transparent Electronics , 2009 .

[22]  A. En Naciri,et al.  Microstructure and optical dispersion characterization of nanocomposite sol-gel TiO₂-SiO₂ thin films with different compositions. , 2015, Spectrochimica acta. Part A, Molecular and biomolecular spectroscopy.

[23]  W. Stickle,et al.  Handbook of X-Ray Photoelectron Spectroscopy , 1992 .

[24]  Wei Xu,et al.  Design, preparation, and durability of TiO2/SiO2 and ZrO2/SiO2 double-layer antireflective coatings in crystalline silicon solar modules , 2013 .

[25]  Dong-Sing Wuu,et al.  Tri-layer antireflection coatings (SiO2/SiO2–TiO2/TiO2) for silicon solar cells using a sol–gel technique , 2006 .

[26]  Shigeng Song,et al.  TiO2/SiO2 multilayer as an antireflective and protective coating deposited by microwave assisted magnetron sputtering , 2013 .

[27]  B. Lawn,et al.  Evaluation of elastic modulus and hardness of thin films by nanoindentation , 2004 .

[28]  D. Kaczmarek,et al.  Effect of Nd doping on structure and improvement of the properties of TiO2 thin films , 2015 .

[29]  Gang Xu,et al.  Cost-effective nanoporous SiO2–TiO2 coatings on glass substrates with antireflective and self-cleaning properties , 2013 .

[30]  Daniel Y. Kwok,et al.  Contact angle measurement and contact angle interpretation , 1999 .