Hybrid Silicon Photonic Integrated Circuit Technology

In this paper, we review the current status of the hybrid silicon photonic integration platform with emphasis on its prospects for increased integration complexity. The hybrid silicon platform is maturing fast as increasingly complex circuits are reported with tens of integrated components including on-chip lasers. It is shown that this platform is well positioned and holds great potential to address future needs for medium-scale photonic integrated circuits.

[1]  J. Bowers,et al.  Wafer fusion: materials issues and device results , 1997 .

[2]  K. Hjort,et al.  Oxidation and Induced Damage in Oxygen Plasma In Situ Wafer Bonding , 2000 .

[3]  Larry A. Coldren,et al.  A quantum-well-intermixing process for wavelength-agile photonic integrated circuits , 2002 .

[4]  Jun Ye,et al.  Orthogonal control of the frequency comb dynamics of a mode-locked laser diode. , 2003, Optics letters.

[5]  Hiroshi Ito,et al.  500 Gbit/s optical gate monolithically integrating photodiode and electroabsorption modulator , 2004 .

[6]  M. Paniccia,et al.  A high-speed silicon optical modulator based on a metal–oxide–semiconductor capacitor , 2004, Nature.

[7]  S. Chandrasekhar,et al.  Low-voltage high-speed travelling wave InGaAsP-InP phase modulator , 2004, IEEE Photonics Technology Letters.

[8]  Qianfan Xu,et al.  Micrometre-scale silicon electro-optic modulator , 2005, Nature.

[9]  V. Lal,et al.  Monolithically integrated active components: a quantum-well intermixing approach , 2005, IEEE Journal of Selected Topics in Quantum Electronics.

[10]  K.-O. Velthaus,et al.  1.55μm Mach-Zehnder Modulators on InP for Optical 40/80 Gbit/s Transmission Networks , 2006, 2006 International Conference on Indium Phosphide and Related Materials Conference Proceedings.

[11]  M.K. Smit,et al.  Simulation and design of integrated femtosecond passively mode-locked semiconductor ring lasers including integrated passive pulse shaping components , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[12]  L. O'Faolain,et al.  Reduced surface sidewall recombination and diffusion in quantum-dot lasers , 2006, IEEE Photonics Technology Letters.

[13]  J. Bowers,et al.  Electrically pumped hybrid AlGaInAs-silicon evanescent laser. , 2006, Optics express.

[14]  Xavier Le Roux,et al.  Optical modulation by carrier depletion in a silicon PIN diode. , 2006, Optics express.

[15]  Juthika Basak,et al.  40 Gbit/s silicon optical modulator for highspeed applications , 2007 .

[16]  Qianfan Xu,et al.  High Speed Carrier Injection 18 Gb/s Silicon Micro-ring Electro-optic Modulator , 2007, LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings.

[17]  Jurgen Michel,et al.  High performance, waveguide integrated Ge photodetectors. , 2007, Optics express.

[18]  Hyundai Park,et al.  1310nm Silicon Evanescent Laser , 2007, 2007 4th IEEE International Conference on Group IV Photonics.

[19]  Masao Ikeda,et al.  Two-photon fluorescence bioimaging with an all-semiconductor laser picosecond pulse source. , 2007, Optics letters.

[20]  M. Smit,et al.  Monolithic Semiconductor Waveguide Device Concept for Picosecond Pulse Amplification, Isolation, and Spectral Shaping , 2007, IEEE Journal of Quantum Electronics.

[21]  Ying-Hao Kuo,et al.  A hybrid AlGaInAs-silicon evanescent preamplifier and photodetector. , 2007, Optics express.

[22]  John E. Bowers,et al.  1310nm Silicon Evanescent Laser , 2007 .

[23]  J. Bowers,et al.  Hybrid silicon evanescent devices , 2007 .

[24]  L. Sekaric,et al.  Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator. , 2007, Optics express.

[25]  Y. Nakano,et al.  InGaAlAs Multiple-Quantum-Well Optical Phase Modulators Based on Carrier Depletion , 2007, IEEE Photonics Technology Letters.

[26]  David A B Miller,et al.  Optical modulator on silicon employing germanium quantum wells. , 2007, Optics express.

[27]  R. Baets,et al.  Electrically Pumped InP-Based Microdisk Lasers Integrated with a Nanophotonic SOI Waveguide Circuit , 2007, OFC 2007.

[28]  Das Subrata,et al.  連続イオン層吸着及び反応(SILAR)法によるSnS薄膜の作製 , 2008 .

[29]  Daoxin Dai,et al.  Ultrasmall Si-nanowire-based polarization rotator , 2008 .

[30]  Alistair Poustie.  Hybrid integration for advanced photonic devices , 2008, SPIE/OSA/IEEE Asia Communications and Photonics.

[31]  M. Smit,et al.  Characterization of a Monolithic Concatenated SOA/SA Waveguide Device for Picosecond Pulse Amplification and Shaping , 2008, IEEE Journal of Quantum Electronics.

[32]  L. Di Cioccio,et al.  A Compact SOI-Integrated Multiwavelength Laser Source Based on Cascaded InP Microdisks , 2008, IEEE Photonics Technology Letters.

[33]  R. Baets,et al.  Design and Optimization of Electrically Injected InP-Based Microdisk Lasers Integrated on and Coupled to a SOI Waveguide Circuit , 2008, Journal of Lightwave Technology.

[34]  Omri Raday,et al.  Integration of hybrid silicon lasers and electroabsorption modulators. , 2008, Optics express.

[35]  Juthika Basak,et al.  Recent development in a high-speed silicon optical modulator based on reverse-biased pn diode in a silicon waveguide , 2008 .

[36]  Tetsuya Mizumoto,et al.  Magneto-optical isolator with silicon waveguides fabricated by direct bonding , 2008 .

[37]  Hyundai Park,et al.  An integrated recirculating optical buffer. , 2008, Optics express.

[38]  M.K. Smit,et al.  Monolithic AWG-based Discretely Tunable Laser Diode With Nanosecond Switching Speed , 2009, IEEE Photonics Technology Letters.

[39]  Avi Zadok,et al.  Electrically pumped hybrid evanescent Si/InGaAsP lasers. , 2009, Optics letters.

[40]  L. Thylen,et al.  Monolithically Integrated 100 GHz DFB-TWEAM , 2009, Journal of Lightwave Technology.

[41]  J.C. Campbell,et al.  InP-Based High-Speed Photodetectors , 2009, Journal of Lightwave Technology.

[42]  David A. B. Miller,et al.  Device Requirements for Optical Interconnects to Silicon Chips , 2009, Proceedings of the IEEE.

[43]  John E. Johnson,et al.  Photonic integration for high-volume, low-cost applications , 2009, IEEE Communications Magazine.

[44]  Di Liang,et al.  Single wavelength silicon evanescent lasers , 2009, 2009 Asia Communications and Photonics conference and Exhibition (ACP).

[45]  Jan Danckaert,et al.  Discretely Tunable Laser Based on Filtered Feedback for Telecommunication Applications , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[46]  J. Michel,et al.  Ge-on-Si laser operating at room temperature. , 2010, Optics letters.

[47]  Assia Barkai,et al.  Integrated hybrid silicon triplexer. , 2010, Optics express.

[48]  B. Ben Bakir,et al.  Hybrid Si/III-V Fabry-Perot lasers based on adiabatic mode transformers , 2010, 7th IEEE International Conference on Group IV Photonics.

[49]  J. Bowers,et al.  Ultra-low loss Si3N4 waveguides with low nonlinearity and high power handling capability. , 2010, Optics express.

[50]  Andrew Alduino,et al.  Demonstration of a high speed 4-channel integrated silicon photonics WDM link with hybrid silicon lasers , 2010, 2010 IEEE Hot Chips 22 Symposium (HCS).

[51]  Di Liang,et al.  Recent progress in lasers on silicon , 2010 .

[52]  Muzammil Iqbal,et al.  Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[53]  Geert Morthier,et al.  An ultra-small, low power all-optical flip-flop memory on a silicon chip , 2010 .

[54]  Geert Morthier,et al.  An ultra-small, low-power all-optical flip-flop memory on a silicon chip , 2010, 2010 Conference on Optical Fiber Communication (OFC/NFOEC), collocated National Fiber Optic Engineers Conference.

[55]  Michael Hochberg,et al.  Towards fabless silicon photonics , 2010 .

[56]  Di Liang,et al.  Hybrid Integrated Platforms for Silicon Photonics , 2010, Materials.

[57]  Geza Kurczveil,et al.  Integrated hybrid silicon DFB laser-EAM array using quantum well intermixing. , 2011, Optics express.

[58]  A. Leinse,et al.  Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding. , 2011, Optics express.

[60]  J. E. Bowers,et al.  An Integrated Hybrid Silicon Multiwavelength AWG Laser , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[61]  J. Bowers,et al.  Novel ultra-short and ultra-broadband polarization beam splitter based on a bent directional coupler. , 2011, Optics express.

[62]  G. Roelkens,et al.  1310-nm Hybrid III–V/Si Fabry–Pérot Laser Based on Adhesive Bonding , 2011, IEEE Photonics Technology Letters.

[63]  J. Bowers,et al.  Low-loss Si3N4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides. , 2011, Optics express.

[64]  Design of transverse electric ring isolators for ultra-low-loss Si3N4 waveguides based on the finite element method. , 2011, Optics letters.

[65]  J. Bowers,et al.  Novel concept for ultracompact polarization splitter-rotator based on silicon nanowires. , 2011, Optics express.

[66]  John E Bowers,et al.  Ultrashort broadband polarization beam splitter based on an asymmetrical directional coupler. , 2011, Optics letters.

[67]  Di Liang,et al.  Fabrication of Silicon-on-Diamond Substrate and Low-Loss Optical Waveguides , 2011, IEEE Photonics Technology Letters.

[68]  Dong Hun Kim,et al.  On-chip optical isolation in monolithically integrated non-reciprocal optical resonators , 2011 .

[69]  V. Kaman,et al.  Heterogeneous photonic integration for microwave systems applications , 2011, IEEE Photonic Society 24th Annual Meeting.

[70]  J. Bowers,et al.  Ultra-high quality factor planar Si3N4 ring resonators on Si substrates. , 2011, Optics express.

[71]  T. Tsuchizawa,et al.  Monolithic Integration of Silicon-, Germanium-, and Silica-Based Optical Devices for Telecommunications Applications , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[72]  J. Bowers,et al.  Hybrid Silicon Laser Technology: A Thermal Perspective , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[73]  J. Bowers,et al.  Hybrid Silicon Photonics for Optical Interconnects , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[74]  Daniel J. Blumenthal,et al.  Integrated recirculating optical hybrid silicon buffers , 2011, OPTO.

[75]  R. G. Beausoleil,et al.  Optimization of Hybrid Silicon Microring Lasers , 2011, IEEE Photonics Journal.

[76]  L. Theogarajan,et al.  Wafer Scale Integration of CMOS Chips for Biomedical Applications via Self-Aligned Masking , 2011, IEEE Transactions on Components, Packaging and Manufacturing Technology.

[77]  Di Liang,et al.  Design of phase-shifted hybrid silicon distributed feedback lasers. , 2011, Optics express.

[78]  J. Bowers,et al.  Silicon ring isolators with bonded nonreciprocal magneto-optic garnets. , 2011, Optics express.

[79]  L. Chen,et al.  Photonic Switching for Data Center Applications , 2011, IEEE Photonics Journal.

[80]  Y. Vlasov,et al.  High-speed and low-power microring modulators for silicon photonics , 2011, IEEE Photonic Society 24th Annual Meeting.

[81]  A. Leinse,et al.  Ultra-low-loss high-aspect-ratio Si3N4 waveguides. , 2011, Optics express.

[82]  L. Coldren,et al.  Two-dimensional free-space beam steering with an optical phased array on silicon-on-insulator. , 2011, Optics express.

[83]  P. Pintus,et al.  Design of Magneto-Optical Ring Isolator on SOI Based on the Finite-Element Method , 2011, IEEE Photonics Technology Letters.

[84]  Di Liang,et al.  Low Threshold Electrically-Pumped Hybrid Silicon Microring Lasers , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[85]  Urban Westergren,et al.  50 Gb/s hybrid silicon traveling-wave electroabsorption modulator. , 2011, Optics express.

[86]  Di Liang,et al.  Device and Integration Technology for Silicon Photonic Transmitters , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[87]  Daoxin Dai,et al.  Mode conversion in tapered submicron silicon ridge optical waveguides. , 2012, Optics express.

[88]  J. E. Bowers,et al.  >200 nm gain-bandwidth hybrid silicon laser array using quantum well intermixing , 2012, ISLC 2012 International Semiconductor Laser Conference.

[89]  L. Coldren,et al.  Hybrid III/V silicon photonic source with integrated 1D free-space beam steering. , 2012, Optics letters.

[90]  G. Duan,et al.  Low-Threshold Heterogeneously Integrated InP/SOI Lasers With a Double Adiabatic Taper Coupler , 2012, IEEE Photonics Technology Letters.

[91]  Reliability of hybrid III-V on Si distributed feedback lasers , 2012, ISLC 2012 International Semiconductor Laser Conference.

[92]  Yongbo Tang,et al.  Over 67 GHz bandwidth hybrid silicon electroabsorption modulator with asymmetric segmented electrode for 1.3 μm transmission. , 2012, Optics express.

[93]  A. P. Knights,et al.  The evolution of silicon photonics as an enabling technology for optical interconnection , 2012 .

[94]  V. Kaman,et al.  Advances in III–V heterogeneous integration on silicon , 2012, IEEE Photonics Conference 2012.

[95]  J. E. Bowers,et al.  Energy-Efficient Hybrid Silicon Electroabsorption Modulator for 40-Gb/s 1-V Uncooled Operation , 2012, IEEE Photonics Technology Letters.

[96]  Integrated hybrid Si/InGaAs 50 Gb/s DQPSK receiver. , 2012, Optics express.

[97]  A hybrid silicon colliding pulse mode-locked laser with integrated passive waveguide section , 2012, IEEE Photonics Conference 2012.

[98]  J. Bowers,et al.  An integrated and compact hybrid silicon 2R regenerator , 2012, IEEE Photonics Conference 2012.

[99]  van der Jjgm Jos Tol,et al.  Moore's law in photonics , 2012 .

[100]  J. E. Bowers,et al.  CMOS enabled silicon photonics for data center packet switching , 2012, 2012 IEEE/MTT-S International Microwave Symposium Digest.

[101]  Hybrid silicon transmitter using quantum well intermixing , 2013, 2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC).

[102]  P. Pintus,et al.  Characterization of Insertion Loss and Back Reflection in Passive Hybrid Silicon Tapers , 2013, IEEE Photonics Journal.

[103]  V. Kaman,et al.  Digitally tunable optical power equalization for large port count optical switches , 2013, 2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC).

[104]  J. Bowers,et al.  Ultralow-Loss Planar $\hbox{Si}_{3}\hbox{N}_{4}$ Waveguide Polarizers , 2013, IEEE Photonics Journal.

[105]  Michael L Davenport,et al.  Title: font: times; size: 18 point; style: plain; justified: center; capitalization: first word and Names only , 2012 .